Pressure control for vacuum processing system

• US 20080216901A1
• Filed: 03/06/2007
• Published: 09/11/2008
• Est. Priority Date: 03/06/2007
• Status: Abandoned Application

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Goldman, David J., Hill, Gordon, Chamberlain, David
• Application Number:
  US11/714,440
• Publication Number:
  US 20080216901A1
• Time in Patent Office: Days
• US Class Current: 137/486
• CPC Class Codes: G05D 16/2013 using throttling means as controlling means
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: Y10T 137/7759 Responsive to change in rate of fluid flow

Abstract

A pressure control system includes a digital communication network between a pressure sensor and a pressure controller. The digital communication network is configured to communicate signals between the pressure sensor and the pressure controller. The pressure sensor is configured to measure pressure within a vacuum chamber in a processing tool. The pressure controller is responsive to pressure measurements made by the pressure sensor and communicated to the pressure controller through the digital communication network, to control the pressure within the vacuum chamber so as to maintain the pressure in the vacuum chamber at a pressure set point received from the tool.

Claims

1. A pressure control system, comprising:

a pressure sensor configured to measure pressure within a vacuum chamber in a processing tool;

a pressure controller configured to control the pressure within the vacuum chamber; and

a digital communication network between the pressure sensor and the pressure controller, the digital network configured to communicate signals between the pressure sensor and the pressure controller;

wherein the pressure controller is responsive to pressure measurements made by the pressure sensor and communicated to the pressure controller through the digital communication network, to control the pressure within the vacuum chamber so as to maintain the pressure in the vacuum chamber at a pressure set point received from the processing tool.

2. The pressure control system of claim 1, wherein the digital communication network comprises a private digital communication network.

3. The pressure control system of claim 2, wherein the private digital communication network is configured to communicate the signals through packet transmission occurring at periodic time intervals.

4. The pressure control system of claim 1, wherein the digital communication network comprises an isolated digital communication network configured to transmit signals with substantially no interference from any other network.

5. The pressure control system of claim 1, wherein the digital communication network is configured to deterministically transmit signals that are substantially free of noise.

6. The pressure control system of claim 1, wherein the processing tool comprises a semiconductor processing tool.

7. The pressure control system of claim 1, wherein the digital communication network is further configured to communicate between the pressure sensor and the pressure controller signals relating to at least one of:

diagnostic information for the pressure control system;

calibration and zeroing of the pressure sensor; and

dynamic range of the pressure sensor.

8. The pressure control system of claim 1, wherein the diagnostic information relates to at least one of:

heater temperature of the pressure sensor;

shorting of a diaphragm in the pressure sensor;

internal failure of the pressure sensor;

cumulative drift of the pressure sensor;

zeroing range of the pressure sensor; and

exceeding of full scale range by the pressure sensor.

9. The pressure control system of claim 1, wherein the digital communication network is configured to communicate the signals at a signal update speed of about 10 msec or higher.

10. The pressure control system of claim 1, wherein the digital communication network comprises at least one of:

Ethernet TCP (Transmission Control Protocol)/IP (Internet Protocol);

DeviceNet;

CAN (Controller Area Network);

UDP/IP (User Datagram Protocol/Internet Protocol);

RS (Recommended Standard)-232; and

RS (Recommended Standard)-485.

11. The pressure control system of claim 1, wherein the pressure sensor comprises a capacitance-based pressure transducer.

12. The pressure control system of claim 1, further comprising a mass flow meter coupled to the digital communication network, the mass flow controller configured to measure flow rate of fluid into and out of the vacuum chamber and to transmit to the pressure controller signals representing the measured flow rate.

13. The pressure control system of claim 1, wherein the digital communication network comprises at least one of:

a one-way communication network configured to communicate pressure-related signals along a single direction; and

a bi-directional communication network configured to transmit pressure-related signals along two opposite directions.

14. A pressure control system comprising:

a digital communication network configured to communicate signals between devices coupled to the network;

a plurality N of pressure sensors coupled to the digital communication network, each of the plurality of pressure sensors configured to measure pressure within a vacuum chamber in a processing tool; and

a pressure controller coupled to the digital communication network, the pressure controller configured to receive a pressure set point from the tool and to control the pressure within the vacuum chamber in response to the received set point and in response to pressure measurements made by each pressure sensor and communicated from each pressure sensor to the pressure controller through the digital communication network, thereby maintaining the pressure in the vacuum chamber at the set point.

15. The pressure control system of claim 14, wherein the number N of pressure sensors is variable.

16. The pressure control system of claim 14, wherein the digital communication network is configured to communicate the signals through packet transmission occurring at periodic time intervals.

17. A system comprising:

a tool including a vacuum processing chamber, and a tool controller configured to generate tool control signals including at least one signal that provides a pressure set point for the vacuum processing chamber;

a pressure sensor configured to measure pressure within the vacuum processing chamber; and

a pressure controller coupled to the pressure sensor through a digital communication network, the pressure controller configured to control the pressure within the vacuum chamber in response to pressure measurements received from the pressure sensor through the digital network and in response to the pressure set point provided by the tool controller, thereby maintaining the pressure in the vacuum chamber at the set point;

wherein the digital communication network is configured to communicate pressure signals between the pressure sensor and the pressure controller.

18. The system of claim 17, further comprising a tool level communication link between the tool controller and the pressure controller, and wherein the tool controller is configured to communicate the pressure set point to the pressure controller through the tool level communication link.

19. A method of controlling pressure in a vacuum chamber in a tool, the method comprising:

measuring pressure in the vacuum chamber;

receiving from the tool a pressure set point for the vacuum chamber;

communicating the pressure measurement and the pressure set point to a pressure controller through a digital communication network; and

the pressure controller controlling the pressure in the vacuum chamber in response to the received pressure measurement and pressure set point, so as to maintain pressure in the vacuum chamber at the pressure set point.