Semiconductor Light emitting device, LED package using the same, and method for fabricating the same
First Claim
1. A semiconductor light emitting device, comprising:
- a substrate;
a metal film deposited on the substrate; and
a semiconductor light emitting element,wherein the metal film comprises;
a barrier metal layer configured to prevent a predetermined material from being diffused into the substrate;
a metal layer consisting essentially of Ti or Pd; and
a reflection layer configured to reflect light emitted from the semiconductor light emitting element,wherein the barrier metal layer, the metal layer, and the reflection layer are deposited in this order from the substrate.
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Accused Products
Abstract
A semiconductor light emitting device is provided which can prevent the reflectance of a metal film from deteriorating due to heat aging and can prevent wire bonding performance of the semiconductor light emitting element from deteriorating due to the diffusion of Ni contained in a Ni barrier metal layer to the reflection layer during die-bonding of the semiconductor light emitting element. The semiconductor light emitting device includes a metal film formed on a substrate and a semiconductor light emitting element. The metal film includes a barrier metal layer configured to prevent a predetermined material from being diffused into the substrate, a metal layer formed on the barrier metal layer; and a reflection layer formed on the metal layer. The reflection layer is configured to reflect light emitted from the semiconductor light emitting element, and the metal layer is made of Ti or Pd.
47 Citations
21 Claims
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1. A semiconductor light emitting device, comprising:
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a substrate; a metal film deposited on the substrate; and a semiconductor light emitting element, wherein the metal film comprises; a barrier metal layer configured to prevent a predetermined material from being diffused into the substrate; a metal layer consisting essentially of Ti or Pd; and a reflection layer configured to reflect light emitted from the semiconductor light emitting element, wherein the barrier metal layer, the metal layer, and the reflection layer are deposited in this order from the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An LED package, comprising:
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a housing; a lead frame provided along part of the housing and having a pair of leads; and a semiconductor light emitting device comprising; a substrate; a metal film deposited on the substrate; and a semiconductor light emitting element, wherein the metal film comprises; a barrier metal layer configured to prevent a predetermined material from being diffused into the substrate; a metal layer consisting essentially of Ti or Pd; and a reflection layer configured to reflect light emitted from the semiconductor light emitting element, wherein the barrier metal layer, the metal layer, the reflection layer are deposited in this order from the substrate, and wherein the semiconductor light emitting element is mounted on at least part of the lead frame and is electrically connected to the pair of leads. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method for fabricating a semiconductor light emitting device, comprising:
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forming a barrier metal layer made of Ni on a silicon substrate; forming a metal layer consisting essentially of Ti or Pd on the barrier metal layer; forming a reflection layer made of Ag or an Ag alloy on the metal layer; and electrically connecting a semiconductor light emitting element to the reflection layer.
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Specification