Method of Repairing Micromirrors in Spatial Light Modulators
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Abstract
Disclosed herein is method of operating a device that comprises an array of micromirrors. The method comprises a process usable for repairing stuck micromirrors of the micromirror array during the operation. The reparation process applies, at the ON state, two consecutive refresh voltages to the mirror plates of the micromirrors in the array with the pulses being separated in time longer than the characteristic oscillation time of the micromirrors. The reparation process can be applied independently to the micromirrors. Alternatively, the reparation process can be incorporated with a bias inversion process.
37 Citations
82 Claims
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1-20. -20. (canceled)
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21. A method of operating a device comprising an array of micromirrors each comprising a deflectable mirror plate and an addressing electrode, the method comprising:
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applying a bias voltage to the mirror plates and a set of voltages to the addressing electrodes during a sequence of color field periods; and applying first refresh voltage pulse to the mirror plates during a spoke period intervening two adjacent color field periods. - View Dependent Claims (22, 27, 28, 29, 30, 34, 35, 37, 38, 80)
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23-26. -26. (canceled)
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31-33. -33. (canceled)
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36. (canceled)
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39. (canceled)
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40. A method of operating a device comprising an array of micromirrors each comprising a deflectable mirror plate and an addressing electrode, the method comprising:
- switching the micromirrors between an ON and OFF state with first bias voltage and a set of voltages on the addressing electrodes; and
applying first and second refresh voltage pulses to the micromirrors, wherein the first and second refresh voltage pulses are spaced in time longer than the intrinsic oscillation time of the micromirrors. - View Dependent Claims (41, 42, 43, 44, 45, 46, 47, 48, 81)
- switching the micromirrors between an ON and OFF state with first bias voltage and a set of voltages on the addressing electrodes; and
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49-79. -79. (canceled)
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82. (canceled)
Specification