MICROELECTROMECHANICAL DEVICE AND METHOD UTILIZING A POROUS SURFACE
First Claim
1. A method of making an interferometric modulator, comprising:
- providing transparent and reflective electrodes facing each other across a collapsible gap;
providing a metallic layer on at least one of facing surfaces; and
anodizing the metallic layer to form an anodized layer.
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Accused Products
Abstract
A microelectromechanical device (MEMS) utilizing a porous electrode surface for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator that includes a transparent electrode having a first surface; and a movable reflective electrode with a second surface facing the first surface. The movable reflective electrode is movable between a relaxed and actuated (collapsed) position. An aluminum layer is provided on either the first or second surface. The aluminum layer is then anodized to provide an aluminum oxide layer which has a porous surface. The porous surface, in the actuated position, decreases contact area between the electrodes, thus reducing stiction.
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Citations
20 Claims
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1. A method of making an interferometric modulator, comprising:
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providing transparent and reflective electrodes facing each other across a collapsible gap; providing a metallic layer on at least one of facing surfaces; and anodizing the metallic layer to form an anodized layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 20)
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13. A method of making an electrostatic microelectromechanical systems device, comprising:
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providing transparent and reflective electrodes facing each other across a cavity; and providing a porous layer on at least one of the electrodes, the porous layer facing the other of the electrodes.
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14. A method of making a microelectromechanical systems device, comprising:
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forming a lower electrode; forming a sacrificial layer over the lower electrode; forming an upper electrode; forming a porous layer between forming the lower electrode and forming the upper electrode. - View Dependent Claims (15, 16, 17, 18, 19)
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Specification