System and Method for Calculating Aerial Image of a Spatial Light Modulator
First Claim
1. A rasterization method for pixels of a spatial light modulator array, comprising:
- pre-computing optical interferences between pixels of the spatial light modulator array in a partial coherent illumination; and
computing at least one of an aerial image or a derivative of the aerial image based on the pre-computed optical interferences, without performing a rasterization computation that modifies pixel states of the pixels of the spatial light modulator array.
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Abstract
A method of calculating an aerial image of a spatial light modulator array includes calculating pair-wise interference between pixels of the spatial light modulator array; calculating effective graytones corresponding to modulation states of the pixels; and calculating the aerial image based on the pair-wise interference and the effective graytones. The graytones depend only on the modulation states of the pixels. The pair-wise interference depends only on position variables. The position variables are position in an image plane and position in a plane of a source of electromagnetic radiation. The pair-wise interference can be represented by a matrix of functions. The pair-wise interference can be represented by a four dimensional matrix. The effective graytones are approximated using sinc functions, or using polynomial functions.
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Citations
20 Claims
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1. A rasterization method for pixels of a spatial light modulator array, comprising:
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pre-computing optical interferences between pixels of the spatial light modulator array in a partial coherent illumination; and computing at least one of an aerial image or a derivative of the aerial image based on the pre-computed optical interferences, without performing a rasterization computation that modifies pixel states of the pixels of the spatial light modulator array. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A rasterization system for pixels of a spatial light modulator array, comprising:
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means for pre-computing optical interferences between pixels of the spatial light modulator array in a partial coherent illumination; and means for computing at least one of an aerial image or a derivative of the aerial image based on the pre-computed optical interferences, without performing a rasterization computation that modifies pixel states of the pixels of the spatial light modulator array. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification