Manufacturing Method of Wiring and Storage Element
First Claim
1. A method for manufacturing a wiring comprising the steps of:
- discharging a composition, in which nanoparticles of a conductive material are dispersed in a solvent, and drawing a wiring pattern;
drying the composition;
exposing the composition in which the solvent has been vaporized by the drying step, to active oxygen to perform pretreatment; and
performing baking after the step of exposing the composition to the active oxygen.
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Accused Products
Abstract
In a coating method, such as a droplet discharge method which requires baking, it is an object of the present invention to reduce the baking temperature at the time of forming a wiring and a conductive film. As a feature of the present invention, a composition, in which nanoparticles of a conductive material are dispersed in a solvent, is discharged using a droplet discharge method, and then dried to vaporize the solvent. Then, pretreatment using active oxygen is performed. After which, baking is then performed, whereby a wiring and a conductive film are formed. By performance of the pretreatment by active oxygen before the baking, a baking temperature at the time of forming the wiring and conductive film can be reduced.
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Citations
24 Claims
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1. A method for manufacturing a wiring comprising the steps of:
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discharging a composition, in which nanoparticles of a conductive material are dispersed in a solvent, and drawing a wiring pattern; drying the composition; exposing the composition in which the solvent has been vaporized by the drying step, to active oxygen to perform pretreatment; and performing baking after the step of exposing the composition to the active oxygen. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for manufacturing a wiring comprising the steps of:
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discharging a composition in which nanoparticles of a conductive material are dispersed in a solvent; drying the composition; irradiating the composition in which the solvent has been vaporized by the drying step, with an ultraviolet ray under an ozone atmosphere; and performing baking after the irradiating step. - View Dependent Claims (9, 10)
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11. A method for manufacturing a wiring comprising the steps of:
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discharging a composition in which nanoparticles of a conductive material are dispersed in a solvent; drying the composition; irradiating the composition in which the solvent has been vaporized by the drying step, with an ultraviolet ray of less than or equal to 240 nm in air; and performing baking after the irradiating step. - View Dependent Claims (12, 13)
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14. A method for manufacturing a wiring comprising the steps of:
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discharging a composition in which nanoparticles of a conductive material are dispersed in a solvent; drying the composition; irradiating the composition in which the solvent has been vaporized by the drying step, with an ultraviolet ray of less than or equal to 175 nm in air; and performing baking after the irradiating step. - View Dependent Claims (15, 16)
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17. A method for manufacturing a storage element comprising the steps of:
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forming a first conductive layer; forming a memory layer over the first conductive layer; discharging a composition, in which nanoparticles of a conductive material are dispersed in a solvent, over the memory layer; drying the composition; exposing the composition in which the solvent has been vaporized by the drying step, to active oxygen to perform pretreatment; and performing baking, after the step of exposing the composition to the active oxygen, to form a second conductive layer. - View Dependent Claims (18)
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19. A method for manufacturing a storage element comprising the steps of:
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forming a first conductive layer; forming a memory layer over the first conductive layer; discharging a composition, in which nanoparticles of a conductive material are dispersed in a solvent, over the memory layer; drying the composition; irradiating the composition in which the solvent has been vaporized by the drying step, with an ultraviolet ray under an ozone atmosphere; and performing baking after the irradiating step to form a second conductive layer. - View Dependent Claims (20)
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21. A method for manufacturing a storage element comprising the steps of:
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forming a first conductive layer; forming a memory layer over the first conductive layer; discharging a composition, in which nanoparticles of a conductive material are dispersed in a solvent, over the memory layer; drying the composition; irradiating the composition in which the solvent has been vaporized by the drying step, with an ultraviolet ray having a wavelength of less than or equal to 240 nm in air; and performing baking after the irradiating step to form a second conductive layer. - View Dependent Claims (22)
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23. A method for manufacturing a storage element comprising the steps of:
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forming a first conductive layer; forming a memory layer over the first conductive layer; discharging a composition, in which nanoparticles of a conductive material are dispersed in a solvent, over the memory layer; drying the composition; irradiating the composition in which the solvent has been vaporized by the drying step, with an ultraviolet ray having a wavelength of less than or equal to 175 nm in air; and
thenperforming baking after the irradiating step to form a second conductive layer. - View Dependent Claims (24)
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Specification