FABRICATING A SPATIAL LIGHT MODULATOR
First Claim
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1. A method of fabricating a spatial light modulator comprising:
- forming a plurality of electrodes on a surface of a control wafer; and
forming a plurality of mirrors on the control wafer, wherein the mirrors each have a cavity in a lower portion of the mirror, a hinge is in the cavity, and the binge is supported by a hinge support post that is between the mirror and the control substrate.
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Abstract
A high contrast spatial light modulator for display and printing is fabricated by coupling a high active reflection area fill-ratio and non-diffractive micro-mirror array with a high electrostatic efficiency and low surface adhesion control substrate.
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Citations
21 Claims
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1. A method of fabricating a spatial light modulator comprising:
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forming a plurality of electrodes on a surface of a control wafer; and forming a plurality of mirrors on the control wafer, wherein the mirrors each have a cavity in a lower portion of the mirror, a hinge is in the cavity, and the binge is supported by a hinge support post that is between the mirror and the control substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification