Plasma spraying for semiconductor grade silicon

• US 20080220558A1
• Filed: 03/05/2008
• Published: 09/11/2008
• Est. Priority Date: 03/08/2007
• Status: Abandoned Application

• Current Assignee: SCIFINITI, Inc.
• Original Assignee: SCIFINITI, Inc.
• Inventors: Zehavi, Raanan Y., Boyle, James E.
• Application Number:
  US12/074,651
• Publication Number:
  US 20080220558A1
• Time in Patent Office: Days
• US Class Current: 438/57
• CPC Class Codes: C23C 4/134 Plasma spraying
• CPC Class Codes: H01L 21/02532 Silicon, silicon germanium, germanium
• CPC Class Codes: H01L 21/02631 Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
• CPC Class Codes: H01L 31/182 Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
• CPC Class Codes: H05H 1/42 with provisions for introducing materials into the plasma, e.g. powder, liquid arc stabilising or constricting arrangements H05H1/3405; coaxial protecting fluids H05H1/341; electrostatic spraying, spraying apparatus with means for charging the spray electrically B05B5/00 ; cf. B23K9/324, B05B7/22
• CPC Class Codes: Y02E 10/546 Polycrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

A plasma spray gun configured to spray semiconductor grade silicon to form semiconductor structures including p-n junctions includes silicon parts such as the cathode or anode or other parts facing the plasma or carrying the silicon powder having at least surface portions formed of high purity silicon. The semiconductor dopant may be included in the sprayed silicon.

Claims

1. A plasma gun for exciting a plasma in a stream of an arc gas, a surface portion of at least one of parts of the gun facing the plasma or a flow of powder into the gun consisting essentially of silicon.

2. The plasma gun of claim 1, wherein the at least one part includes at least one electrode of multiple electrodes of the gun.

3. The plasma gun of claim 2, wherein one or more of the electrodes are doped to be conductive.

4. The plasma gun of claim 2, having auxiliary heating means for heating the one electrode to a temperature at which it can act as an electrode.

5. The plasma gun of claim 1, wherein the at least one part includes at least one powder injector for injecting powder into the stream and having at least a surface portion facing a flow of the powder consisting essentially of silicon.

6. A plasma spraying method, comprising:

exciting a plasma in a stream of an arc gas in a plasma gun having at least one electrode having a surface portion facing the plasma consisting essentially of silicon;

injecting silicon powder into the stream having a metal impurity level of less than 10 parts per million weight; and

directing the stream with the injected silicon to a substrate to form a silicon layer thereupon.

8. The method of claim 6, wherein the silicon layer forms part of a semiconductor device having a p-n junction.

9. The method of claim 8, wherein the semiconductor device comprises a solar cell.

10. The method of claim 6, wherein the silicon powder consists of particles 95% of which have diameters of less than 10 micrometers.

11. The method of claim 6, wherein chemical vapor deposition forms the large-particle silicon powder or a larger body ground into the suitably sized fine-particle size range of silicon powder.

12. The method of claim 6, further comprising the prior step of heating the surface portion to be electrically conductive.