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Delivery of Low Pressure Dopant Gas to a High Voltage Ion Source

  • US 20080220596A1
  • Filed: 08/29/2006
  • Published: 09/11/2008
  • Est. Priority Date: 08/30/2005
  • Status: Abandoned Application
First Claim
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1. A gas delivery apparatus adapted to transfer low-pressure gas from a supply thereof to an ion source characterized by an elevated voltage potential in relation to said supply, said gas delivery apparatus comprising a gas flow passage, a voltage generator electrically coupled with at least a portion of the gas flow passage to impose an electric field thereon, and an obstructive structure adapted to modulate acceleration length of electrons of said low-pressure gas in relation to ionization potential of said low-pressure gas in the gas flow passage, to suppress ionization of said low-pressure gas in said gas flow passage.

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