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Minute structure inspection device, inspection method, and inspection program

  • US 20080223136A1
  • Filed: 02/04/2008
  • Published: 09/18/2008
  • Est. Priority Date: 08/04/2005
  • Status: Abandoned Application
First Claim
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1. A minute structure inspection device for evaluating a characteristic of at least one minute structure having a movable portion, the minute structure being formed on a substrate, the minute structure inspection device comprising:

  • sound wave generating means for outputting a test sound wave to said minute structure upon testing; and

    evaluating means for detecting movement of said movable portion of said minute structure in response to said test sound wave outputted by said sound wave generating means, and evaluating said characteristic of said minute structure on a basis of a result of the detection, whereinsaid evaluating means evaluates said characteristic of said minute structure on a basis of a comparison between an output voltage outputted on a basis of said movement of said movable portion of said minute structure in at least one given frequency band and an output voltage corresponding to a given threshold.

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