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Industrial pressure sensor having enhanced dielectric fill fluid

  • US 20080223140A1
  • Filed: 04/03/2008
  • Published: 09/18/2008
  • Est. Priority Date: 03/16/2007
  • Status: Active Grant
First Claim
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1. A capacitance-based pressure sensor comprising:

  • a housing comprising;

    an interior cavity within the housing; and

    a channel extending from an exterior of the housing to the interior cavity;

    a sensing diaphragm disposed within the interior cavity;

    an electrode disposed within the interior cavity opposing the sensing diaphragm; and

    a fill fluid occupying the interior cavity such that a pressure from the channel is conveyed to the sensing diaphragm to adjust a capacitance between the electrode and the sensing diaphragm;

    wherein the fill fluid has a dielectric constant greater than about 3.5.

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