NON-VOLATILE MEMORY
First Claim
1. A non-volatile memory, comprising:
- a substrate;
a plurality of isolation layers, disposed in the substrate;
a plurality of active layers, disposed in the substrate and between the isolation layers, wherein the top surface of the active layer is higher than that of the isolation layer, and the active layers and the isolation layers are arranged in parallel to each other and extend in a first direction;
a plurality of control gates, disposed in the substrate, wherein the control gates are arranged in parallel and extend in a second direction which crosses the first direction;
a plurality of floating gates, disposed between the active layers and the control gates; and
a plurality of doped regions, disposed in the active layers between the control gates.
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Abstract
A non-volatile memory includes a substrate, a number of isolation layers, a number of active layers, a number of floating gates, a number of control gates and a number of doped regions. The active layers are disposed in the substrate between the isolation layers, and the top surface of the active layer is higher than that of the isolation layer. The active layers and the isolation layers are arranged in parallel to each other and extend in the first direction. The control gates are disposed in the substrate. The control gates are arranged in parallel and extend in the second direction which crosses the first direction. The floating gates are disposed between the active layers and the control gates. The doped regions are disposed in the active layers between the control gates.
221 Citations
7 Claims
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1. A non-volatile memory, comprising:
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a substrate; a plurality of isolation layers, disposed in the substrate; a plurality of active layers, disposed in the substrate and between the isolation layers, wherein the top surface of the active layer is higher than that of the isolation layer, and the active layers and the isolation layers are arranged in parallel to each other and extend in a first direction; a plurality of control gates, disposed in the substrate, wherein the control gates are arranged in parallel and extend in a second direction which crosses the first direction; a plurality of floating gates, disposed between the active layers and the control gates; and a plurality of doped regions, disposed in the active layers between the control gates. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Specification