Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method
First Claim
1. An optical integrator system comprising:
- a first optical integrator including a plurality of first wavefront dividing elements arranged in juxtaposition along a predetermined direction; and
a second optical integrator including a plurality of second wavefront dividing elements arranged in juxtaposition along the predetermined direction, said first optical integrator and said second optical integrator being arranged in order from an entrance side of light;
wherein each of the first wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface of the first wavefront dividing element are emitted in parallel with the optical axis from the first wavefront dividing element, andwherein each of the second wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface of the second wavefront dividing element are emitted obliquely to the optical axis from the second wavefront dividing element.
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Abstract
An optical integrator system comprises a first optical integrator including a plurality of first wavefront dividing elements arranged in juxtaposition along a predetermined direction, and a second optical integrator including a plurality of second wavefront dividing elements arranged in juxtaposition along the predetermined direction, which are arranged in order from the entrance side of light. The first wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted in parallel with the optical axis. The second wavefront dividing elements are so constructed that rays obliquely incident to a center on the optical axis of an entrance surface are emitted obliquely to the optical axis.
42 Citations
19 Claims
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1. An optical integrator system comprising:
- a first optical integrator including a plurality of first wavefront dividing elements arranged in juxtaposition along a predetermined direction; and
a second optical integrator including a plurality of second wavefront dividing elements arranged in juxtaposition along the predetermined direction, said first optical integrator and said second optical integrator being arranged in order from an entrance side of light;wherein each of the first wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface of the first wavefront dividing element are emitted in parallel with the optical axis from the first wavefront dividing element, and wherein each of the second wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface of the second wavefront dividing element are emitted obliquely to the optical axis from the second wavefront dividing element. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
- a first optical integrator including a plurality of first wavefront dividing elements arranged in juxtaposition along a predetermined direction; and
Specification