Detection system for nanometer scale topographic measurements of reflective surfaces
0 Assignments
0 Petitions
Accused Products
Abstract
A linear position array detector system is provided which imparts light energy to a surface of a specimen, such as a semiconductor wafer, receives light energy from the specimen surface and monitors deviation of the retro or reflected beam from that expected to map the contours on the specimen surface. The retro beam will, with ideal optical alignment, return along the same path as the incident beam if and only if the surface is normal to the beam. The system has a measurement device or sensor within the path of the retro or reflected beam to measure deviation of the retro beam from expected. The sensor is preferably a multiple element array of detector-diodes aligned in a linear fashion. A unique weighting and summing scheme is provided which increases the mechanical dynamic range while preserving sensitivity. The system further includes a bright field Nomarski Differential Interference Contrast sensor used to split the beam into two beams and for scanning in an orientation orthogonal to the orientation of the optical lever created by the system.
37 Citations
80 Claims
-
1-60. -60. (canceled)
-
61. A detector array configured for use with a light source, comprising:
-
a plurality of elements configured to detect a reflected beam of light energy provided by the light source and reflected from a component, said reflected beam having a beam diameter; and a plurality of electrical connections affixed to said plurality of elements, said plurality of electrical connections connectable to at least one inspection device; wherein said elements have width less than approximately one third the beam diameter. - View Dependent Claims (62, 63, 64, 65, 66)
-
-
67. A method for inspecting a specimen, comprising:
-
providing light energy to said specimen, thereby creating a retro beam reflected from said specimen; providing said retro beam to a multi-element sensing device comprising a plurality of linearly oriented sensing elements such that said retro beam is received by at least three of said sensing elements; and altering a characteristic of said electrical output according to a weighting corresponding to a distance of said plurality of sensing elements from a predetermined point on said multi-element sensing device. - View Dependent Claims (68, 69, 70, 71, 72, 73)
-
-
74. A method for inspecting the surface of a specimen, comprising:
-
providing at least three linearly arranged elements having electrical connections to an inspection device and predetermined spacing therebetween; and imparting a light beam onto said linearly arranged elements, wherein said light beam is expected to move in a predetermined direction substantially collinear with said linearly arranged elements; wherein said beam spans at least three of said linearly arranged elements. - View Dependent Claims (75, 76, 77, 78, 79, 80)
-
Specification