Bit line gate transistor structure for a multilevel, dual-sided nonvolatile memory cell NAND flash array
First Claim
1. A nonvolatile memory structure comprising:
- a plurality of dual-sided charge-trapping nonvolatile memory cells connected in a NAND series string; and
a pair of serially connected top select transistors,wherein each of the pair of serially connected top select transistors have a first source/drain and each of the first source/drains are connected together,wherein a first of the serially connected top select transistors has an implant to make a threshold voltage of the implanted first serially connected select transistor different from a non-implanted second serially connected top select transistor,wherein a second source/drain of one of the pair of serially connected transistors is connected to a top dual-sided charge-trapping nonvolatile memory cell of the NAND series string of dual-sided charge-trapping nonvolatile memory cells, andwherein a second source/drain of another of the serially connected transistors is connected to a first of two bit lines associated with the NAND series string nonvolatile memory structure.
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Accused Products
Abstract
A nonvolatile memory structure with pairs of serially connected select transistors connected to the top and optionally to the bottom of NAND series strings of groups of the dual-sided charge-trapping nonvolatile memory cells for controlling connection of the NAND series string to an associated bit line. A first of the serially connected select transistors has an implant to make a threshold voltage of the implanted first serially connected select transistor different from a non-implanted second serially connected select transistor. The pair of serially connected top select transistors is connected to a first of two associated bit lines. Optionally, the NAND nonvolatile memory strings further is connected a pair of serially connected bottom select transistors that is connected to the second associated bit line.
47 Citations
51 Claims
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1. A nonvolatile memory structure comprising:
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a plurality of dual-sided charge-trapping nonvolatile memory cells connected in a NAND series string; and a pair of serially connected top select transistors, wherein each of the pair of serially connected top select transistors have a first source/drain and each of the first source/drains are connected together, wherein a first of the serially connected top select transistors has an implant to make a threshold voltage of the implanted first serially connected select transistor different from a non-implanted second serially connected top select transistor, wherein a second source/drain of one of the pair of serially connected transistors is connected to a top dual-sided charge-trapping nonvolatile memory cell of the NAND series string of dual-sided charge-trapping nonvolatile memory cells, and wherein a second source/drain of another of the serially connected transistors is connected to a first of two bit lines associated with the NAND series string nonvolatile memory structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A nonvolatile memory array comprising:
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a plurality of nonvolatile memory cells arranged in row and columns such that groups of the nonvolatile memory cells are serially connected to form NAND nonvolatile memory strings where each column includes at least one of the NAND nonvolatile memory strings, each of the NAND nonvolatile memory strings further comprising; a pair of serially connected top select transistors, wherein the pair of serially connected top select transistors each has a first source/drain with the two first source/drains of the pair of serially connected top select transistors being connected together, wherein a first of the serially connected top select transistors has an implant to make a threshold voltage of the implanted first serially connected top select transistor different from a non-implanted second serially connected top select transistor, wherein a second source/drain of one top select transistor of the pair of serially connected top select transistors is connected to a top dual-sided charge-trapping nonvolatile memory cell of the NAND series string of dual-sided charge-trapping nonvolatile memory cells, and a plurality of bit lines, placed within the nonvolatile memory array such that each the bit lines is associated with at least one of the columns of the plurality of NAND nonvolatile memory strings and each of the columns of the plurality of NAND nonvolatile memory strings is associated with a pair of bit lines. wherein a second source/drain of a top select transistor of the pair of serially connected top select transistors is connected to a first of the two bit lines associated with the NAND series string nonvolatile memory structure. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34)
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35. A method of forming a nonvolatile memory structure comprising the steps of:
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forming a plurality of dual-sided charge-trapping nonvolatile memory cells; connecting a plurality of dual-sided charge-trapping nonvolatile memory cells in a NAND series string; forming a pair of serially connected top select transistors; connecting together both first source/drain of the pair of serially connected top select transistors; implanting a first of the serially connected top select transistors to make a threshold voltage of the implanted first serially connected select transistor different from a non-implanted second serially connected top select transistor; connecting a second source/drain of one of the pair of serially connected transistors to a top dual-sided charge-trapping nonvolatile memory cell of the NAND series string of dual-sided charge-trapping nonvolatile memory cells; and connecting a second source/drain of another of the serially connected transistors to a first of two bit lines associated with the NAND series string nonvolatile memory structure. - View Dependent Claims (36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51)
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Specification