Capacitive Distance Sensing In Semiconductor Processing Tools
First Claim
1. A sensor for sensing a gap between the sensor and an object of interest within a semiconductor processing chamber, the sensor including:
- a housing;
a power source disposed within the housing;
wireless communication circuitry coupled to the power source;
a controller coupled to wireless communication circuitry and to the power source;
a plurality of capacitive plate pairs configured to form capacitors having a capacitance that varies with the gap;
measurement circuitry coupled to the controller and to the plurality of capacitive plate pairs, the measurement circuitry being configured to measure the capacitance of the capacitive plate pairs and provide indications thereof to the controller; and
wherein the controller is configured to provide an indication relative to the gap based, at least in part, upon the measured capacitances.
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Accused Products
Abstract
A sensor for sensing a gap between the sensor and an object of interest within a semiconductor processing chamber is provided. The sensor includes a housing, a power source inside the housing, wireless communication circuitry, a controller, measurement circuitry and a plurality of capacitive plate pairs. The controller and wireless communication circuitry are coupled to each other, and to the power source. The plurality of capacitive plate pairs are configured to form capacitors having a capacitance that varies with the gap. Measurement circuitry is coupled to the controller and to the plurality of capacitive plate pairs. The measurement circuitry is configured to measure the capacitance of the capacitive plate pairs and provide indications thereof to the controller. The controller is configured to provide an indication relative to the gap based, at least in part, upon the measured capacitances.
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Citations
10 Claims
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1. A sensor for sensing a gap between the sensor and an object of interest within a semiconductor processing chamber, the sensor including:
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a housing; a power source disposed within the housing; wireless communication circuitry coupled to the power source; a controller coupled to wireless communication circuitry and to the power source; a plurality of capacitive plate pairs configured to form capacitors having a capacitance that varies with the gap; measurement circuitry coupled to the controller and to the plurality of capacitive plate pairs, the measurement circuitry being configured to measure the capacitance of the capacitive plate pairs and provide indications thereof to the controller; and wherein the controller is configured to provide an indication relative to the gap based, at least in part, upon the measured capacitances. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification