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EFFICIENT SPATIAL MODULATOR SYSTEM

  • US 20080231568A1
  • Filed: 03/21/2007
  • Published: 09/25/2008
  • Est. Priority Date: 03/21/2007
  • Status: Active Grant
First Claim
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4-1. The spatial light modulator system of claim 1, wherein the spatial light modulator includes a tiltable micro mirror plate supported by a substrate and one or more electrodes under the micro mirror plate.

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