Liquid recovery system, immersion exposure apparatus, immersion exposing method, and device fabricating method

• US 20080233512A1
• Filed: 03/17/2008
• Published: 09/25/2008
• Est. Priority Date: 03/23/2007
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Nagasaka, Hiroyuki, Okuyama, Takeshi, Nishii, Yasufumi
• Granted Patent: US 8,134,685 B2
• Time in Patent Office: Days
• US Class Current: 430/117.32
• CPC Class Codes: G03F 7/70341 Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply chemical composition of immersion liquids G03F7/2041

Abstract

A liquid recovery system is used by an immersion exposure apparatus. The liquid recovery system comprises: a plate that has a first surface and a second surface on the side opposite the first surface; and a liquid recovery part, at least part of which opposes the second surface with a first gap interposed therebetween. The liquid recovery system recovers the liquid on a movable object that opposes the first surface of the plate via the liquid recovery part.

Claims

1. A liquid recovery system that is used by an immersion exposure apparatus, comprising:

a plate that comprises a first surface and a second surface on the side opposite the first surface; and

a liquid recovery part, at least a part of which opposes the second surface with a first gap interposed therebetween;

wherein,

liquid on a movable object that opposes the first surface of the plate is recovered via the liquid recovery part.

2. A liquid recovery system according to claim 1, wherein

the liquid recovery part comprises a recovery region that is capable of recovering the liquid and that has a larger area than the second surface.

3. A liquid recovery system according to claim 1, wherein

the liquid recovery part comprises a porous member;

and

at least a part of the liquid that contacts the porous member is recovered via the porous member.

4. A liquid recovery system according to claim 3, wherein

the porous member prevents a gas from passing therethrough.

5. A liquid recovery system according to claim 1, wherein

the liquid recovery part is capable of recovering the liquid that flows into the first gap.

6. A liquid recovery system according to claim 1, comprising:

a first opening, into which the liquid on the movable object can flow.

7. A liquid recovery system according to claim 6, comprising:

a second opening that is different from the first opening;

wherein,

the first gap is open to the atmosphere via the second opening.

8. A liquid recovery system according to claim 7, wherein

a distance between the second opening and the movable object is larger than a distance between the first opening and the movable object.

9. A liquid recovery system according to claim 8, wherein

the second opening does not face the movable object.

10. A liquid recovery system according to claim 6, wherein

the first opening is provided between an edge of the plate and the liquid recovery part.

11. A liquid recovery system according to claim 6, further comprising:

a third opening;

wherein,

the liquid on the movable object that opposes the third opening can flow from the third opening into the first gap via the first opening.

12. A liquid recovery system according to claim 11, comprising:

a first member that comprises the liquid recovery part; and

a second member that is disposed in a vicinity of the first member;

wherein,

the third opening is formed between the plate and the second member.

13. A liquid recovery system according to claim 12, wherein

the second member comprises a liquid contact surface;

and

the liquid on the movable object that opposes the liquid contact surface of the second member and the first surface of the plate can flow from the third opening into the first gap via the first opening.

14. A liquid recovery system according to claim 13, wherein

a distance between the movable object and the first surface is smaller than a distance between the movable object and the liquid contact surface.

15. A liquid recovery system according to claim 12, comprising:

a second gap that is provided between the first member and the second member; and

a fourth opening that is different from the third opening;

wherein,

the second gap is connected to the third opening and is open to the atmosphere via the fourth opening.

16. A liquid recovery system according to claim 6, wherein

the liquid recovery part comprises a first region, which faces the object, and a second region, which faces the second surface of the plate, and

the second region of the liquid recovery part is capable of recovering the liquid that flows into the first gap via the first opening.

17. A liquid recovery system according to claim 16, wherein

the liquid recovery part is provided at least a part of a space surrounding a liquid contact surface between which and the movable object the liquid can be retained.

18. A liquid recovery system according to claim 17, wherein

the second region of the liquid recovery part is provided outside the first region with respect to the liquid contact surface.

19. A liquid recovery system according to claim 17, wherein

a distance between the movable object and the liquid contact surface is smaller than a distance between the movable object and the first region.

20. A liquid recovery system according to claim 17, wherein

a distance between the movable object and the liquid contact surface is larger than a distance between the movable object and at least a part of the first surface.

21. A liquid recovery system according to claim 17, wherein

the first surface is substantially parallel to the liquid contact surface.

22. A liquid recovery system according to claim 17, wherein

the second surface comprises an edge that is disposed at the first opening and that is closer to the movable object than the liquid contact surface.

23. A liquid recovery system according to claim 6, wherein

the first opening is provided annularly;

and

the first gap is provided annularly along the first opening.

24. A liquid recovery system according to claim 23, wherein

the liquid recovery part is provided annularly along the first gap.

25. A liquid recovery system according to claim 1, wherein

the first gap forms a capillary passage into which the liquid on the movable object can flow.

26. A liquid recovery system according to claim 1, wherein

the second surface comprises an inclined part that is inclined with respect to the first surface.

27. A liquid recovery system according to claim 1, wherein

the second surface comprises an inclined part, which is inclined with respect to the first surface, and a flat part, which is substantially parallel to the first surface.

28. A liquid recovery system according to claim 1, wherein

the second surface is lyophilic with respect to the liquid.

29. A liquid recovery system according to claim 1, wherein

the first surface is liquid repellent with respect to the liquid.

30. An immersion exposure apparatus that exposes a substrate, comprising:

an optical member that comprises an emergent surface from which exposure light is emitted;

a plate that comprises a first surface and a second surface on the side opposite the first surface; and

a liquid recovery part, at least a part of which opposes the second surface with a first gap interposed therebetween;

wherein,

liquid on an object that opposes the first surface of the plate is recovered via the liquid recovery part.

31. An immersion exposure apparatus according to claim 30, wherein

the liquid recovery part comprises a recovery region that is capable of recovering the liquid and that has a larger area than the second surface.

32. An immersion exposure apparatus according to claim 30, wherein

the object is capable of moving to a position that opposes the emergent surface of the optical member.

33. An immersion exposure apparatus according to claim 30, wherein

the object comprises the substrate;

and

the substrate is irradiated with the exposure light through the liquid on the substrate.

34. An immersion exposure apparatus according to claim 30, wherein

the liquid recovery part comprises a porous member;

and

at least a part of the liquid that contacts the porous member is recovered via the porous member.

35. An immersion exposure apparatus according to claim 34, wherein

the porous member prevents a gas from passing therethrough.

36. An immersion exposure apparatus according to claim 30, wherein

the liquid recovery part is capable of recovering the liquid that flows into the first gap.

37. An immersion exposure apparatus according to claim 30, comprising:

a first opening, into which the liquid on the object can flow.

38. An immersion exposure apparatus according to claim 37, comprising:

a second opening that is different from the first opening;

wherein,

the first gap is open to the atmosphere via the second opening.

39. An immersion exposure apparatus according to claim 38, wherein

a distance between the second opening and the object is larger than a distance between the first opening and the object.

40. An immersion exposure apparatus according to claim 38, wherein

the second opening does not face the object.

41. An immersion exposure apparatus according to claim 37, wherein

the first opening is provided between an edge of the plate and the liquid recovery part.

42. An immersion exposure apparatus according to claim 37, further comprising:

a third opening;

wherein,

the liquid on the object that opposes the third opening can flow from the third opening into the first gap via the first opening.

43. An immersion exposure apparatus according to claim 42, comprising:

a first member that comprises the liquid recovery part; and

a second member that is disposed in a vicinity of the optical member so that the second member surrounds an optical path of the exposure light;

wherein,

the third opening is formed between the plate and the second member.

44. An immersion exposure apparatus according to claim 43, wherein

the second member comprises a liquid contact surface;

and

the liquid on the object that opposes the liquid contact surface of the second member and the first surface of the plate can flow from the third opening into the first gap via the first opening.

45. An immersion exposure apparatus according to claim 44, wherein

a distance between the object and the first surface is smaller than a distance between the object and the liquid contact surface.

46. An immersion exposure apparatus according to claim 44, wherein

the liquid contact surface of the second member is parallel to a front surface of the object.

47. An immersion exposure apparatus according to claim 43, wherein

the second member has an opening through which the exposure light passes.

48. An immersion exposure apparatus according to claim 43, comprising:

a second gap that is provided between the first member and the second member; and

a fourth opening that is different from the third opening;

wherein,

the second gap is connected to the third opening and is open to the atmosphere via the fourth opening.

49. An immersion exposure apparatus according to claim 37, wherein

the liquid recovery part comprises a first region, which faces the object, and a second region, which faces the second surface of the plate, and

the second region of the liquid recovery part is capable of recovering the liquid that flows into the first gap via the first opening.

50. An immersion exposure apparatus according to claim 49, further comprising:

an opening through which the exposure light passes; and

a liquid contact surface that is provided surrounding the opening, and between which and the object the liquid can be retained,

wherein

the liquid recovery part is provided at least a part of a space surrounding the liquid contact surface.

51. An immersion exposure apparatus according to claim 50, wherein

the second region of the liquid recovery part is provided outside the first region with respect to the liquid contact surface.

52. An immersion exposure apparatus according to claim 50, wherein

a distance between the object and the liquid contact surface is smaller than a distance between the object and the first region.

53. An immersion exposure apparatus according to claim 50, wherein

a distance between the object and at least a part of the first surface is smaller than a distance between the object and the liquid contact surface.

54. An immersion exposure apparatus according to claim 50, wherein

the first surface is substantially parallel to the liquid contact surface.

55. An immersion exposure apparatus according to claim 50, wherein

the second surface comprises an edge that is disposed at the first opening and that is closer to the object than the liquid contact surface.

56. An immersion exposure apparatus according to claim 49, wherein

the plate is capable of moving relative to the liquid recovery part.

57. An immersion exposure apparatus according to claim 37, wherein

the first opening is provided annularly so that the first opening surrounds the optical path of the exposure light;

and

the first gap is provided annularly along the first opening.

58. An immersion exposure apparatus according to claim 57, wherein

the liquid recovery part is provided annularly along the first gap.

59. An immersion exposure apparatus according to claim 30, wherein

the first gap forms a capillary passage into which the liquid on the object can flow.

60. An immersion exposure apparatus according to claim 30, wherein

the first surface is disposed so that the first surface surrounds the optical path of the exposure light;

and

at least a part of the first surface comprises an inclined part that gradually becomes more spaced apart from the front surface of the object, which opposes the first surface, in a direction that leads away from the optical path of the exposure light.

61. An immersion exposure apparatus according to claim 30, wherein

the second surface comprises an inclined part that is inclined with respect to the first surface.

62. An immersion exposure apparatus according to claim 30, wherein

the second surface comprises an inclined part, which is inclined with respect to the first surface, and a flat part, which is parallel to the first surface.

63. An immersion exposure apparatus according to claim 61, wherein

the inclined part gradually becomes more spaced apart from the front surface of the object, which opposes the first surface, in a direction that leads away from the optical path of the exposure light.

64. An immersion exposure apparatus according to claim 30, wherein

the second surface is lyophilic with respect to the liquid.

65. An immersion exposure apparatus according to claim 30, wherein

the first surface is liquid repellent with respect to the liquid.

66. A device fabricating method, comprising:

exposing a substrate using an immersion exposure apparatus according to claim 30; and

developing the exposed substrate.

67. An immersion exposing method that exposes a substrate, the method comprising:

exposing the substrate with exposure light through a liquid on the substrate; and

recovering the liquid on the substrate using a liquid recovery system during the exposure of the substrate;

wherein,

the liquid recovery system comprises;

a plate that comprises a first surface and a second surface on the side opposite the first surface; and

a liquid recovery part that is disposed so that at least a part of the liquid recovery part opposes the second surface with a first gap interposed therebetween;

wherein,

the liquid on the substrate that opposes the first surface of the plate is recovered via the liquid recovery part.

68. An immersion exposing method according to claim 67, wherein

the liquid recovery part comprises a porous member.

69. A device fabricating method comprising:

exposing a substrate using an exposing method according to claim 67; and

developing the exposed substrate.

70. An immersion exposure apparatus comprising:

an optical member comprising an exit surface from which light exits, the exit surface being in contact with a liquid, the liquid being disposed in at least a space between the exit surface and a movable object;

a liquid contact surface facing the movable object;

a liquid recovery surface surrounding the liquid contact surface and comprising a suction region via which the liquid is suctioned;

a first surface facing the movable object, at least a part of the first surface being disposed between the liquid recovery surface and the movable object;

a second surface being disposed between the liquid recovery surface and the first surface, at least a part of the liquid second surface facing the liquid recovery surface; and

a gap into which the liquid flows via an opening between the liquid recovery surface and the second surface,

wherein

the liquid, which has been flowed into the gap, is recovered via the liquid recovery surface.

79. An immersion exposure apparatus according to claim 70, wherein

the movable object comprises a substrate being to be exposed with light from the optical member.

80. A device fabricating method comprising:

exposing a substrate using an immersion exposure apparatus according to claim 70; and

developing the exposed substrate.

71. An immersion exposure apparatus comprising:

an optical member comprising an exit surface from which light exits, the exit surface being in contact with a liquid, the liquid being disposed in at least a space between the exit surface and a movable object;

a liquid contact surface facing the movable object;

a liquid recovery surface surrounding the liquid contact surface and comprising a suction region via which the liquid is suctioned, a part of the suction region being adjacent to an optical path of the light and facing the movable object;

a first surface facing the movable object, at least a part of the first surface being disposed between the liquid recovery surface and the movable object; and

a second surface facing the liquid recovery surface, at least a part of the second surface being disposed between the first surface and the liquid recovery surface.

72. An immersion exposure apparatus according to claim 71, further comprising:

a second surface facing the liquid recovery surface, at least a part of the second surface being disposed between the first surface and the liquid recovery surface.

73. An immersion exposure apparatus comprising:

an optical member comprising an exit surface from which light exits, the exit surface being in contact with a liquid, the liquid being disposed in at least a space between the exit surface and a movable object;

a liquid contact surface facing the movable object;

a liquid recovery surface surrounding the liquid contact surface and comprising a suction region via which the liquid is suctioned; and

a first surface facing the movable object, the first surface covering a part of the suction region that is relatively far from the liquid contact surface, the first surface uncovering a part of the suction region that is relatively closer to the liquid contact surface.

74. An immersion exposure apparatus according to claim 73, further comprising:

a second surface facing the part of the suction surface that is relatively far from the liquid contact surface.

75. An immersion exposure apparatus comprising:

an optical member comprising an exit surface from which light exits, the exit surface being in contact with a liquid, the liquid being disposed in at least a space between the exit surface and a movable object;

a liquid contact surface facing the movable object;

a liquid recovery surface surrounding the liquid contact surface and comprising a suction region via which the liquid is suctioned;

a first surface facing the movable object, at least a part of the first surface being disposed between the liquid recovery surface and the movable object;

a second surface being disposed between the liquid recovery surface and the first surface, at least a part of the liquid second surface facing the liquid recovery surface; and

a gap into which the liquid flows via an opening between the liquid recovery surface and the second surface,

wherein

a position of the second surface at the opening is closer to the movable object than the liquid contact surface.

76. An immersion exposure apparatus comprising:

an optical member comprising an exit surface from which light exits, the exit surface being in contact with a liquid, the liquid being disposed in at least a space between the exit surface and a movable object;

a liquid contact surface facing the movable object;

a liquid recovery surface surrounding the liquid contact surface and comprising a suction region via which the liquid is suctioned;

a gap into which the liquid flows via an opening between the liquid contact surface and the recovery surface; and

a first surface facing the movable object, at least a part of the first surface being disposed between the liquid recovery surface and the movable object.

77. An immersion exposure apparatus according to claim 76, wherein

a second surface facing the liquid recovery surface, at least a part of the second surface being disposed between the first surface and the liquid recovery surface.

78. An immersion exposure apparatus comprising:

an optical member comprising an exit surface from which light exits, the exit surface being in contact with a liquid, the liquid being disposed in at least a space between the exit surface and a movable object;

a liquid contact surface facing the movable object;

a liquid recovery surface surrounding the liquid contact surface and comprising a suction region via which the liquid is suctioned;

a first gap into which the liquid flows via an opening between the liquid contact surface and the recovery surface;

a first surface facing the movable object, at least a part of the first surface being disposed between the liquid recovery surface and the movable object;

a second surface being disposed between the liquid recovery surface and the first surface, at least a part of the liquid second surface facing the liquid recovery surface; and

a second gap into which the liquid flows via an opening between the liquid recovery surface and the second surface.