METHODS FOR FABRICATING OPTICAL MICROSTRUCTURES BY IMAGING A RADIATION SENSITIVE LAYER SANDWICHED BETWEEN OUTER LAYERS
First Claim
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1. A method of fabricating a microlens array comprising:
- imaging a microlens array master blank that comprises a radiation sensitive layer sandwiched between a pair of outer layers, on an imaging platform, by scanning a radiation beam through one of the outer layers and across at least a portion of the radiation sensitive layer at varying amplitude to define the microlens array in the radiation sensitive layer; and
removing at least one of the outer layers.
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Abstract
Microstructures are fabricated by imaging a microstructure master blank that includes a radiation sensitive layer sandwiched between a pair of outer layers, on an imaging platform, to define the microstructures in the radiation sensitive layer. At least one of the outer layers is then removed. The microstructures that were defined in the radiation sensitive layer are developed. The radiation sensitive layer sandwiched between the pair of outer layers may be fabricated as webs, to provide microstructure master blanks.
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Citations
20 Claims
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1. A method of fabricating a microlens array comprising:
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imaging a microlens array master blank that comprises a radiation sensitive layer sandwiched between a pair of outer layers, on an imaging platform, by scanning a radiation beam through one of the outer layers and across at least a portion of the radiation sensitive layer at varying amplitude to define the microlens array in the radiation sensitive layer; and removing at least one of the outer layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method of fabricating a microlens array master comprising:
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placing on a cylindrical platform, a microlens array master blank that comprises a first outer layer, a negative photoresist layer on the first outer layer and a second outer layer on the negative photoresist layer, such that the first outer layer is adjacent the cylindrical platform and the second outer layer is remote from the cylindrical platform; impinging a laser beam through the second outer layer into the negative photoresist layer while simultaneously rotating the cylindrical platform about an axis thereof and while simultaneously axially rastering the laser beam across at least a portion of the negative photoresist layer to image the microlens array in the negative photoresist layer; separating the first outer layer from the cylindrical platform; separating the first outer layer from the negative photoresist layer; and developing the microlens array that was imaged in the negative photoresist layer. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification