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Temperature control apparatus, processing apparatus, and temperature control method

  • US 20080234875A1
  • Filed: 03/14/2008
  • Published: 09/25/2008
  • Est. Priority Date: 03/22/2007
  • Status: Active Grant
First Claim
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1. A temperature control apparatus comprising:

  • a resistance heater to have characteristics such that a resistance value of the resistance heater changes dependently on a temperature thereof;

    a signal generator to output a control signal having two voltage levels of a first-voltage and a second-voltage;

    a switching section to flow a first current through the resistance heater when the voltage level of the control signal is the first-voltage, and to flow a second current having a current value smaller than that of the first current through the resistance heater when the voltage level of the control signal is the second-voltage; and

    a voltage measuring instrument to measure a voltage value across the resistance heater at the time when the second current flows through the resistance heater, whereinthe signal generator controls the temperature of the resistance heater based on the voltage value measured by the voltage measuring instrument.

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