Temperature control apparatus, processing apparatus, and temperature control method
First Claim
1. A temperature control apparatus comprising:
- a resistance heater to have characteristics such that a resistance value of the resistance heater changes dependently on a temperature thereof;
a signal generator to output a control signal having two voltage levels of a first-voltage and a second-voltage;
a switching section to flow a first current through the resistance heater when the voltage level of the control signal is the first-voltage, and to flow a second current having a current value smaller than that of the first current through the resistance heater when the voltage level of the control signal is the second-voltage; and
a voltage measuring instrument to measure a voltage value across the resistance heater at the time when the second current flows through the resistance heater, whereinthe signal generator controls the temperature of the resistance heater based on the voltage value measured by the voltage measuring instrument.
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Accused Products
Abstract
Disclosed is a temperature control apparatus including: a resistance heater to have a characteristic such that a resistance value of the resistance heater changes dependently on a temperature thereof; a signal generator to output a control signal having two voltage levels of an on-voltage and an second-voltage; a switching section to flow a first current through the resistance heater when the voltage level of the control signal is the first-voltage, and to flow a second current having a current value smaller than that of the first current through the resistance heater when the voltage level of the control signal is the second-voltage; and a voltage measuring instrument to measure a voltage value across the resistance heater at the time when the second current flows through the resistance heater, wherein the signal generator controls the temperature of the resistance heater based on the voltage value measured by the voltage measuring instrument.
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Citations
25 Claims
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1. A temperature control apparatus comprising:
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a resistance heater to have characteristics such that a resistance value of the resistance heater changes dependently on a temperature thereof; a signal generator to output a control signal having two voltage levels of a first-voltage and a second-voltage; a switching section to flow a first current through the resistance heater when the voltage level of the control signal is the first-voltage, and to flow a second current having a current value smaller than that of the first current through the resistance heater when the voltage level of the control signal is the second-voltage; and a voltage measuring instrument to measure a voltage value across the resistance heater at the time when the second current flows through the resistance heater, wherein the signal generator controls the temperature of the resistance heater based on the voltage value measured by the voltage measuring instrument. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A processing apparatus, supplied a raw material, subjected to temperature control thereof, causing a reaction or a phase change of the raw material, the apparatus comprising:
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a processing device to cause the reaction or the phase change of the raw material; and a temperature control apparatus including; a resistance heater, provided in the processing device to heat the processing device, to have characteristics such that a resistance value of the resistance heater changes dependently on a temperature thereof; a signal generator to output a control signal having two voltage levels of a first-voltage and a second-voltage; a switching section to flow a first current through the resistance heater when the voltage level of the control signal is the first-voltage, and to flow a second current having a current value smaller than that of the first current through the resistance heater when the voltage level of the control signal is the second-voltage; and a voltage measuring instrument to measure a voltage value across the resistance heater at the time when the second current flows through the resistance heater, wherein the signal generator controls the temperature of the resistance heater based on the voltage value measured by the voltage measuring instrument. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A temperature control method for controlling a temperature of a resistance heater having characteristics such that a resistance value of the resistance heater changes dependently on the temperature, the method comprising the steps of:
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outputting a control signal having two voltage levels of a first-voltage and a second-voltage; flowing a first current through the resistance heater when the voltage level of the control signal is the first-voltage, and flowing a second current having a current value smaller than that of the first current through the resistance heater when the voltage level of the control signal is the second-voltage; measuring a voltage value across the resistance heater at the time when the second current flows through the resistance heater; and controlling the control signal to control the temperature of the resistance heater on a basis of the voltage value measured at the step of measuring the voltage value. - View Dependent Claims (19, 20, 21, 22)
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23. A temperature control method controlling a temperature of a resistance heater having characteristics such that a resistance value of the resistance heater changes dependently on the temperature, the method comprising the steps of:
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outputting a control signal having two voltage levels of a first-voltage and a second-voltage; flowing a first current through the resistance heater when the voltage level of the control signal is the first-voltage, and flowing a second current having a current value smaller than that of the first current through the resistance heater when the voltage level of the control signal is the second-voltage; measuring a voltage value across the resistance heater at the time when the second current flows through the resistance heater, and measuring the resistance value of the resistance heater on a basis of the measured voltage value and the current value of the second current; and controlling the control signal to control the temperature of the resistance heater on a basis of the resistance value measured at the step of measuring the resistance value. - View Dependent Claims (24, 25)
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Specification