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Method and apparatus for determining an optical model that models the effects of optical proximity correction

  • US 20080235651A1
  • Filed: 03/21/2007
  • Published: 09/25/2008
  • Est. Priority Date: 03/21/2007
  • Status: Active Grant
First Claim
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1. A method for determining an optical model that models effects of optical proximity correction, the method comprising:

  • receiving a first optical model which is represented using kernels;

    receiving a test layout;

    determining a first dataset by convolving the kernels with the test layout at sampling points in the test layout;

    applying optical proximity correction to the test layout to obtain a corrected test layout;

    determining a second dataset by convolving the kernels with the corrected test layout at the sampling points in the corrected test layout; and

    determining a second optical model using the first dataset and the second dataset.

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