Methodology for cleaning of surface metal contamination from electrode assemblies
First Claim
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1. A method for cleaning an electrode assembly for generating plasma in a plasma chamber comprising a plasma-exposed silicon surface, the method comprising:
- pre-cleaning with nitric acid solution an inner liner of a bath and a component used to suspend the electrode assembly in the bath, wherein the nitric acid solution comprises less than 10% nitric acid;
suspending the electrode assembly within the pre-cleaned inner liner of the bath using the pre-cleaned component;
soaking the electrode assembly in or cleaning the electrode assembly with ultra-pure water contained within the pre-cleaned inner liner of the bath;
removing the electrode assembly from the pre-cleaned inner liner of the bath; and
removing contaminants from the silicon surface by contacting the silicon surface with acidic solution comprising hydrofluoric acid, nitric acid, acetic acid, and water,wherein the electrode assembly comprises a showerhead electrode having a plurality of gas outlets.
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Abstract
Systematic and effective methodology to clean capacitively coupled plasma reactor electrodes and reduce surface roughness so that the cleaned electrodes meet surface contamination specifications and manufacturing yields are enhanced. Pre-cleaning of tools used in the cleaning process helps prevent contamination of the electrode being cleaned.
53 Citations
20 Claims
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1. A method for cleaning an electrode assembly for generating plasma in a plasma chamber comprising a plasma-exposed silicon surface, the method comprising:
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pre-cleaning with nitric acid solution an inner liner of a bath and a component used to suspend the electrode assembly in the bath, wherein the nitric acid solution comprises less than 10% nitric acid; suspending the electrode assembly within the pre-cleaned inner liner of the bath using the pre-cleaned component; soaking the electrode assembly in or cleaning the electrode assembly with ultra-pure water contained within the pre-cleaned inner liner of the bath; removing the electrode assembly from the pre-cleaned inner liner of the bath; and removing contaminants from the silicon surface by contacting the silicon surface with acidic solution comprising hydrofluoric acid, nitric acid, acetic acid, and water, wherein the electrode assembly comprises a showerhead electrode having a plurality of gas outlets. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method for cleaning an electrode assembly for generating plasma in a plasma chamber comprising a plasma-exposed silicon surface, the method comprising:
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pre-cleaning with nitric acid solution a fixture used to position the electrode assembly such that the silicon surface faces downward, wherein the nitric acid solution comprises less than 10% nitric acid; placing the electrode assembly on the fixture such that the silicon surface faces downward; and removing contaminants from the downward facing silicon surface by contacting the silicon surface with acidic solution comprising hydrofluoric acid, nitric acid, acetic acid, and water.
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Specification