Rf Mems Switch With a Flexible and Free Switch Membrane
First Claim
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1. RF MEMS switch comprising micromechanical switching means that can be actuated between two positions:
- a first position (off-state) and a second position (on-state), and actuation means for actuating the position of the switching means, wherein the micromechanical switching means comprise a flexible membrane which is freely supported by support means, which is bendable under the action of the actuation means, and which can freely slide relatively to the support means during its bending movement.
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Abstract
The RF MEMS switch comprising micromechanical switching means that are carried by a substrate (1) and that can be actuated between two positions: a first position (off-state/FIG. 1) and a second position (on-state), and actuation means for actuating the position of the switching means. The micromechanical switching means comprise a flexible membrane (6) which is freely supported by support means (3), which is bendable under the action of the actuation means (7), and which can freely slide relatively to the support means (3) during its bending movement.
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13 Claims
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1. RF MEMS switch comprising micromechanical switching means that can be actuated between two positions:
- a first position (off-state) and a second position (on-state), and actuation means for actuating the position of the switching means, wherein the micromechanical switching means comprise a flexible membrane which is freely supported by support means, which is bendable under the action of the actuation means, and which can freely slide relatively to the support means during its bending movement.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
Specification