ELECTRODE AND INTERCONNECT MATERIALS FOR MEMS DEVICES
First Claim
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1. A microelectromechanical system (MEMS) device, comprising:
- a conductor; and
a movable element configured to be actuated by the conductor,wherein the conductor is configured to partially transmit light and to partially reflect light, and the conductor is configured to reflect from about 5% to about 40% of incident light.
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Abstract
A microelectromechanical (MEMS) device is presented which comprises a metallized semiconductor. The metallized semiconductor can be used for conductor applications because of its low resistivity, and for transistor applications because of its semiconductor properties. In addition, the metallized semiconductor can be tuned to have optical properties which allow it to be useful for optical MEMS devices.
104 Citations
24 Claims
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1. A microelectromechanical system (MEMS) device, comprising:
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a conductor; and a movable element configured to be actuated by the conductor, wherein the conductor is configured to partially transmit light and to partially reflect light, and the conductor is configured to reflect from about 5% to about 40% of incident light. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of using a microelectromechanical system (MEMS) device, comprising:
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applying a voltage to a conductor, wherein a movable element is actuated in response to the voltage; and partially transmitting light and partially reflecting light with the conductor, wherein the conductor is configured to reflect from about 5% to about 40% of the light. - View Dependent Claims (17, 18, 19)
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20. A method of manufacturing a microelectromechanical system (MEMS) device, the method comprising:
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forming a conductor; and forming a movable element configured to be actuated by the conductor, wherein the conductor is configured to partially transmit light and to partially reflect light, and the conductor is configured to reflect from about 5% to about 40% of incident light. - View Dependent Claims (21, 22, 23, 24)
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Specification