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Mirror device

  • US 20080239454A1
  • Filed: 05/31/2008
  • Published: 10/02/2008
  • Est. Priority Date: 11/01/2003
  • Status: Active Grant
First Claim
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1. A mirror device, comprising:

  • a plurality of deflectable mirrors;

    an elastic member for supporting the mirror in a deflectable state,a drive electrode for driving the mirror; and

    a control circuit for providing the drive electrode with charge according to an input signal to control the deflection direction of the mirror, whereinthe drive electrode is also used as a stopper for specifying the deflection angle of the mirror.

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