Mirror device
First Claim
1. A mirror device, comprising:
- a plurality of deflectable mirrors;
an elastic member for supporting the mirror in a deflectable state,a drive electrode for driving the mirror; and
a control circuit for providing the drive electrode with charge according to an input signal to control the deflection direction of the mirror, whereinthe drive electrode is also used as a stopper for specifying the deflection angle of the mirror.
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Accused Products
Abstract
A spatial light modulator supported on a device substrate includes a plurality of light modulation elements to modulate a light emitted from a light source. The spatial light modulator and the device substrate further comprises a cyclic structure on a surface of the spatial light modulator and/or the device substrate for preventing a reflection of the incident light from the cyclic structure. In an exemplary embodiment the cyclic structure includes cyclic structural elements having a distance between two cyclic elements shorter than the wavelength of an incident light for preventing a reflection of the incident light from the cyclic structure.
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Citations
14 Claims
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1. A mirror device, comprising:
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a plurality of deflectable mirrors; an elastic member for supporting the mirror in a deflectable state, a drive electrode for driving the mirror; and a control circuit for providing the drive electrode with charge according to an input signal to control the deflection direction of the mirror, wherein the drive electrode is also used as a stopper for specifying the deflection angle of the mirror. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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Specification