Method for manufacturing semiconductor device

• US 20080242005A1
• Filed: 03/14/2008
• Published: 10/02/2008
• Est. Priority Date: 03/26/2007
• Status: Active Grant

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Tsurume, Takuya, Ohtani, Hisashi, Sugiyama, Eiji, Dozen, Yoshitaka
• Granted Patent: US 7,736,958 B2
• Time in Patent Office: Days
• US Class Current: 438/127
• CPC Class Codes: H01L 27/1214 comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
• CPC Class Codes: H01L 27/1255 integrated with passive devices, e.g. auxiliary capacitors
• CPC Class Codes: H01L 27/1266 the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate

Abstract

In the present application, is disclosed a method of manufacturing a flexible semiconductor device having an excellent reliability and tolerance to the loading of external pressure. The method includes the steps of: forming a separation layer over a substrate having an insulating surface; forming an element layer including a semiconductor element comprising a non-single crystal semiconductor layer, over the separation layer; forming an organic resin layer over the element layer; providing a fibrous body formed of an organic compound or an inorganic compound on the organic resin layer; heating the organic resin layer; and separating the element layer from the separation layer. This method allows the formation of a flexible semiconductor device having a sealing layer in which the fibrous body is impregnated with the organic resin.

Claims

1. A method of manufacturing a semiconductor device, comprising the steps of:

forming a separation layer over a substrate;

forming an element layer over the separation layer, wherein the element layer comprises an active element having a non-single crystal semiconductor layer and an insulating layer which covers the active element;

providing a fibrous body over the element layer;

applying a composition containing an organic resin from above the fibrous body to form an organic resin layer comprising the organic resin and the fibrous body so that the fibrous body is impregnated with the organic resin,

heating the organic resin layer to form a sealing layer including the fibrous body and the organic resin; and

separating the element layer and the sealing layer from the separation layer.

2. The method of manufacturing a semiconductor device according to claim 1,

wherein the method further comprises a step of forming a wiring in the element layer and an antenna over the insulating layer so that the antenna is electrically connected to the non-single crystal semiconductor layer through the wiring.

3. The method of manufacturing a semiconductor device according to claim 1, further comprising the steps of:

forming a wiring in the element layer so that the wiring is electrically connected to the non-single crystal semiconductor layer; and

providing an antenna so that the antenna is electrically connected to the active element through the wiring.

4. The method of manufacturing a semiconductor device according to claim 1,

wherein the method further comprises a step of forming a protective film over the sealing layer.

5. The method of manufacturing a semiconductor device according to claim 1,

wherein the fibrous body is formed of an organic compound or an inorganic compound.

6. The method of manufacturing a semiconductor device according to claim 1,

wherein the active element is one or more of a thin film transistor, a nonvolatile memory element, and a diode.

7. The method of manufacturing a semiconductor device according to claim 1,

wherein the substrate has an insulating surface over which the separation layer is provided.

8. A method of manufacturing a semiconductor device, comprising the steps of:

forming a separation layer over a substrate;

forming an element layer over the separation layer, wherein the element layer comprises an active element having a non-single crystal semiconductor layer and an insulating layer which covers the active element;

providing a first fibrous body over the element layer;

applying a first composition containing a first organic resin from above the first fibrous body to form a first organic resin layer comprising the first organic resin and the first fibrous body so that the first fibrous body is impregnated with the first organic resin,

heating the first organic resin layer to form a first sealing layer including the first fibrous body and the first organic resin;

separating the element layer and the first sealing layer from the separation layer;

providing a surface of the element layer with a second fibrous body, wherein the surface is an opposite surface over which the first fibrous body is provided;

applying a second composition containing a second organic resin over the surface of the element layer to form a second organic resin layer comprising the second organic resin and the second fibrous body so that the second fibrous body is impregnated with the second organic resin; and

heating the second organic resin layer to form a second sealing layer including the second fibrous body and the second organic resin.

9. The method of manufacturing a semiconductor device according to claim 8,

wherein the method further comprises a step of forming a wiring in the element layer and an antenna over the insulating layer so that the antenna is electrically connected to the non-single crystal semiconductor layer through the wiring.

10. The method of manufacturing a semiconductor device according to claim 8, further comprising the steps of:

forming a wiring in the element layer so that the wiring is electrically connected to the non-single crystal semiconductor layer; and

providing an antenna so that the antenna is electrically connected to the active element through the wiring.

11. The method of manufacturing a semiconductor device according to claim 8,

wherein the method further comprises a step of forming a protective film over any of the first sealing layer and the second sealing layer.

12. The method of manufacturing a semiconductor device according to claim 8,

wherein the first fibrous body and the second fibrous body are formed of an organic compound or an inorganic compound.

13. The method of manufacturing a semiconductor device according to claim 8,

wherein the active element is one or more of a thin film transistor, a nonvolatile memory element, and a diode.

14. The method of manufacturing a semiconductor device according to claim 8,

wherein the substrate has an insulating surface over which the separation layer is provided.

15. A method of manufacturing a semiconductor device, comprising the steps of:

forming a separation layer over a substrate;

forming an element layer over the separation layer, wherein the element layer comprises an active element having a non-single crystal semiconductor layer and an insulating layer which covers the active element;

applying a composition containing an organic resin over the element layer to form an organic resin layer,

providing a fibrous body over the organic resin layer so that the fibrous body is included in the organic resin layer and impregnated with the organic resin;

heating the organic resin layer to form a sealing layer including the fibrous body and the organic resin; and

separating the element layer and the sealing layer from the separation layer.

16. The method of manufacturing a semiconductor device according to claim 15,

wherein the method further comprises a step of forming a wiring in the element layer and an antenna over the insulating layer so that the antenna is electrically connected to the non-single crystal semiconductor layer through the wiring.

17. The method of manufacturing a semiconductor device according to claim 15, further comprising the steps of:

forming a wiring in the element layer so that the wiring is electrically connected to the non-single crystal semiconductor layer; and

providing an antenna so that the antenna is electrically connected to the active element through the wiring.

18. The method of manufacturing a semiconductor device according to claim 15,

wherein the method further comprises a step of forming a protective film over the sealing layer.

19. The method of manufacturing a semiconductor device according to claim 15,

wherein the fibrous body is formed of an organic compound or an inorganic compound.

20. The method of manufacturing a semiconductor device according to claim 15,

wherein the active element is one or more of a thin film transistor, a nonvolatile memory element, and a diode.

21. The method of manufacturing a semiconductor device according to claim 15,

wherein the substrate has an insulating surface over which the separation layer is provided.

22. A method of manufacturing a semiconductor device, comprising the steps of:

forming a separation layer over a substrate;

forming an element layer over the separation layer, wherein the element layer comprises an active element having a non-single crystal semiconductor layer and an insulating layer which covers the active element;

applying a first composition containing a first organic resin over the element layer to form a first organic resin layer,

providing a first fibrous body over the first organic resin layer so that the first fibrous body is included in the first organic resin layer and impregnated with the first organic resin;

heating the first organic resin layer to form a first sealing layer including the first fibrous body and the first organic resin;

separating the element layer and the first sealing layer from the separation layer;

applying a second composition containing a second organic resin on a surface of the element layer, wherein the surface is an opposite surface over which the first composition is applied;

providing a second fibrous body over the second composition containing the second organic resin to form a second organic resin layer comprising the second organic resin and the second fibrous body so that the second fibrous body is impregnated with the second organic resin; and

heating the second organic resin layer to form a second sealing layer including the second fibrous body and the second organic resin.

23. The method of manufacturing a semiconductor device according to claim 22,

wherein the method further comprises a step of forming a wiring in the element layer and an antenna over the insulating layer so that the antenna is electrically connected to the non-single crystal semiconductor layer through the wiring.

24. The method of manufacturing a semiconductor device according to claim 22, further comprising the steps of:

forming a wiring in the element layer so that the wiring is electrically connected to the non-single crystal semiconductor layer; and

providing an antenna so that the antenna is electrically connected to the active element through the wiring.

25. The method of manufacturing a semiconductor device according to claim 22,

wherein the method further comprises a step of forming a protective film over any of the first sealing layer and the second sealing layer.

26. The method of manufacturing a semiconductor device according to claim 22,

wherein the first fibrous body and the second fibrous body are formed of an organic compound or an inorganic compound.

27. The method of manufacturing a semiconductor device according to claim 22,

wherein the active element is one or more of a thin film transistor, a nonvolatile memory element, and a diode.

28. The method of manufacturing a semiconductor device according to claim 22,

wherein the substrate has an insulating surface over which the separation layer is provided.