METHOD FOR FABRICATING TRENCH DIELECTRIC LAYER IN SEMICONDUCTOR DEVICE
First Claim
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1. A method for fabricating a trench dielectric layer in a semiconductor device, comprising:
- forming a trench in a semiconductor substrate;
forming a liner nitride layer on an inner wall of the trench;
forming a liner oxide layer on the liner nitride layer;
nitrifying the liner oxide layer; and
filling the trench with a dielectric layer.
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Abstract
A method for fabricating a trench dielectric layer in a semiconductor device is provided. A trench is formed in a semiconductor substrate and a liner nitride layer is then formed on an inner wall of the trench. A liner oxide layer formed on the liner nitride layer is nitrified in order to protect the liner nitride layer from being exposed. Subsequently, the trench is filled with one or more dielectric layers.
19 Citations
17 Claims
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1. A method for fabricating a trench dielectric layer in a semiconductor device, comprising:
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forming a trench in a semiconductor substrate; forming a liner nitride layer on an inner wall of the trench; forming a liner oxide layer on the liner nitride layer; nitrifying the liner oxide layer; and filling the trench with a dielectric layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for fabricating a trench dielectric layer in a semiconductor device, the method comprising:
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forming a trench in a semiconductor substrate; forming a liner nitride layer on an inner wall of the trench; forming a liner oxide layer on the liner nitride layer; nitrifying the liner oxide layer; filling the trench with a first dielectric layer; etching the first dielectric layer to expose a top of the trench, wherein, after being etching, the first dielectric layer has a predetermined thickness; and filling the trench by forming a second dielectric layer on the first dielectric layer. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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Specification