RECIPE-AND-COMPONENT CONTROL MODULE AND METHODS THEREOF
First Claim
1. A recipe-and component control module (RACCM), said RACCM being a server for performing data management in a plasma processing system with a plurality of components, said RACCM comprising:
- a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with each component of said plurality of components;
aida coordinating agent said coordinating agent being configured to receive processed data from said plurality of intelligent agents.
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Abstract
A recipe-and component control module (RACCM) is provided. The RACCM is a server for performing data management in a plasma processing system with a plurality of components. The RACCM includes a plurality of intelligent agents. Each intelligent agent of the intelligent agents is configured to interact with each component of the plurality of components. The RACCM also includes a coordinating agent, which is configured to receive processed data from the plurality of intelligent agents.
91 Citations
26 Claims
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1. A recipe-and component control module (RACCM), said RACCM being a server for performing data management in a plasma processing system with a plurality of components, said RACCM comprising:
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a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with each component of said plurality of components;
aida coordinating agent said coordinating agent being configured to receive processed data from said plurality of intelligent agents. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An article of manufacture comprising a program storage medium having computer readable code embodied therein, said computer readable code being configured to perform data management for a plasma processing system, comprising:
code for providing a recipe-and component control module (RACCM), said RACCM being a server wherein said RACCM including a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with each component of said plurality of components, and a coordinating agent, said coordinating agent being configured to receive processed data from said plurality of intelligent agents. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A computer-implemented method for performing data management, in a plasma processing system, comprising:
providing a recipe-and component control module (RACCM), said RACCM being a server wherein said RACCM including a plurality of intelligent agents, each intelligent agent of said intelligent agents being configured to interact with each component of said plurality of components, a coordinating agent, said coordinating agent being configured to receive processed data from said plurality of intelligent agents, and a set of provisional agents, said set of provisional agents being configured to perform recipe management, said recipe management including distributing at least part of a recipe to at least one of said plurality of intelligent agents and said coordinating agent. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
Specification