METHOD AND DEVICE FOR MULTISTATE INTERFEROMETRIC LIGHT MODULATION
First Claim
1. A method of driving a MEMS device comprising a first electrode, a second electrode, and a movable electrode positioned between the first electrode and the second electrode and configured to move to at least two positions therebetween, the method comprising, the method comprising:
- applying a first voltage potential difference between the first electrode and the movable electrode so as to drive the movable electrode to a position substantially in contact with a dielectric layer, wherein an attractive force is created between the movable electrode and the dielectric layer;
applying a second voltage potential difference between the first electrode and the movable electrode and a third voltage potential difference between the second electrode and the movable electrode so as to overcome the attractive force between the movable electrode and the dielectric layer and to drive the movable electrode away from the dielectric layer.
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Accused Products
Abstract
A multi-state light modulator comprises a first reflector. A first electrode is positioned at a distance from the first reflector. A second reflector is positioned between the first reflector and the first electrode. The second reflector is movable between an undriven position, a first driven position, and a second driven position, each having a corresponding distance from the first reflector. In one embodiment, the three positions correspond to reflecting white light, being non-reflective, and reflecting a selected color of light. Another embodiment is a method of making the light modulator. Another embodiment is a display including the light modulator.
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Citations
29 Claims
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1. A method of driving a MEMS device comprising a first electrode, a second electrode, and a movable electrode positioned between the first electrode and the second electrode and configured to move to at least two positions therebetween, the method comprising, the method comprising:
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applying a first voltage potential difference between the first electrode and the movable electrode so as to drive the movable electrode to a position substantially in contact with a dielectric layer, wherein an attractive force is created between the movable electrode and the dielectric layer; applying a second voltage potential difference between the first electrode and the movable electrode and a third voltage potential difference between the second electrode and the movable electrode so as to overcome the attractive force between the movable electrode and the dielectric layer and to drive the movable electrode away from the dielectric layer. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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- 8. The method of claim 8, wherein light of a second wavelength is reflected when the movable electrode when the movable electrode is in the undriven position.
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10. A microelectromechanical (MEMS) device, comprising:
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a first reflector; a first electrode positioned at a distance from the first reflector; and a second reflector positioned between the first reflector and the first electrode, the second reflector being selectively movable to each of an undriven position, a first position, and a second position, wherein the first position is closer to the first reflector than is the undriven position and wherein the second position is farther from the first reflector than is the undriven position. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 23, 24, 25, 26, 27, 28, 29)
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Specification