Deposited Microarchitectured Battery and Manufacturing Method
First Claim
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1. A battery comprising:
- a first portion including a substrate having formed thereon a thin-film current collector and a thin-film anode electrode material characterized by a highly porous microstructure and provided by a physical vapor deposition process;
a second portion including a substrate having formed thereon a thin-film current collector and a thin-film cathode electrode material characterized by a highly porous microstructure provided by a physical vapor deposition process; and
the first portion being coupled to the second portion and a separator placed between the first portion and the second portion to separate the anode electrode material from the cathode electrode material.
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Abstract
A battery includes a first portion including a substrate having formed thereon a current collector and an anode electrode material. A second portion is formed on a substrate and includes a current collector and a cathode electrode material. The first portion is joined to the second portion and a separator is disposed between the first portion and the second portion as joined to separate the anode electrode material from the cathode electrode material. An electrolyte is placed in contact with the anode electrode material, the cathode electrode material and the separator.
48 Citations
23 Claims
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1. A battery comprising:
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a first portion including a substrate having formed thereon a thin-film current collector and a thin-film anode electrode material characterized by a highly porous microstructure and provided by a physical vapor deposition process; a second portion including a substrate having formed thereon a thin-film current collector and a thin-film cathode electrode material characterized by a highly porous microstructure provided by a physical vapor deposition process; and the first portion being coupled to the second portion and a separator placed between the first portion and the second portion to separate the anode electrode material from the cathode electrode material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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- 9. A MEMS system comprising a substrate into which or onto which a MEMS device is disposed and a microbattery deposited directly onto the substrate, device chip or chip carrier and electrically coupled to the MEMS device.
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16. A microarchitectured battery comprising a first microarchitectured cell coupled to one or more additional microarchitectured cell(s).
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19. A method of making a battery comprising etching or ablating a first substrate to form a first cavity;
- disposing within the first cavity a current collector material and an anode electrode material;
etching or ablating a portion of a second substrate to form a second cavity;disposing within the second cavity a current collector material and a cathode electrode material; providing a separator between the first substrate and the second substrate separating the anode material from the cathode material. - View Dependent Claims (20, 21, 22, 23)
- disposing within the first cavity a current collector material and an anode electrode material;
Specification