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Method of Forming a Micromechanical Device with Microfluidic Lubricant Channel

  • US 20080248613A1
  • Filed: 09/26/2007
  • Published: 10/09/2008
  • Est. Priority Date: 09/27/2006
  • Status: Abandoned Application
First Claim
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1. A method of forming a micromechanical device assembly, comprising the steps of:

  • forming a micromechanical device; and

    forming a lubricant channel that extends through an interior wall of a processing region of the micromechanical device, wherein a substantial length of the lubricant channel extends into the interior wall to be completely enclosed thereby.

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