Method of Forming a Micromechanical Device with Microfluidic Lubricant Channel

• US 20080248613A1
• Filed: 09/26/2007
• Published: 10/09/2008
• Est. Priority Date: 09/27/2006
• Status: Abandoned Application

• Current Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Original Assignee: Miradia Inc. (Walsin Lihwa Corporation)
• Inventors: Chen, Dongmin, Worley, William Spencer, Chen, Hung-Nan
• Application Number:
  US11/862,178
• Publication Number:
  US 20080248613A1
• Time in Patent Office: Days
• US Class Current: 438/115
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/0005 Anti-stiction coatings
• CPC Class Codes: B81C 1/0096 For avoiding stiction when the device is in use, i.e. after manufacture has been completed
• CPC Class Codes: B81C 2201/112 Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B

Abstract

A micromechanical device assembly includes a micromechanical device enclosed within a processing region and a lubricant channel formed through an interior wall of the processing region and in fluid communication with the processing region. Lubricant is injected into the lubricant channel via capillary forces and held therein via surface tension of the lubricant against the internal surfaces of the lubrication channel. The lubricant channel containing the lubricant provides a ready supply of fresh lubricant to prevent stiction from occurring between interacting components of the micromechanical device disposed within the processing region.

Claims

1. A method of forming a micromechanical device assembly, comprising the steps of:

forming a micromechanical device; and

forming a lubricant channel that extends through an interior wall of a processing region of the micromechanical device, wherein a substantial length of the lubricant channel extends into the interior wall to be completely enclosed thereby.

2. The method of claim 1, further comprising the step of forming a channel inlet through an external surface of the micromechanical device assembly, wherein the channel inlet is in fluid communication with the lubricant channel.

3. The method of claim 2, further comprising the step of sealing the channel inlet proximate the external surface of the micromechanical device assembly.

4. The method of claim 1, further comprising the step of disposing a particle filter within the lubricant channel.

5. The method claim 1, further comprising the step of coating the interior surface of the lubricant channel with an organic passivating material.

6. A method of storing a lubricant in a package having a micromechanical device and a processing region for the micromechanical device, comprising the steps of:

forming a lubricant channel that extends through an interior wall of the processing region, wherein a substantial length of the lubricant channel extends into the interior wall to be completely enclosed thereby; and

adding a lubricant into the lubricant channel.

7. The method of claim 6, further comprising the step of sealing the package prior to the step of adding the lubricant.

8. The method of claim 7, further comprising the steps of:

forming a hole to access the lubricant channel from the exterior; and

injecting the lubricant through the hole into the lubricant channel via capillary forces.

9. The method of claim 6, further comprising the step of sealing the package after the step of adding the lubricant.

10. The method of claim 9, further comprising the step of placing a cap in the lubricant channel proximate an opening of the lubricant channel into the processing region, wherein the cap comprises a material that becomes porous in response to optical radiation or heating.

11. A method of injecting a lubricant into a lubricant channel of a micromechanical device assembly, comprising the steps of:

forming a hole to access the lubricant channel from the exterior; and

injecting the lubricant through the hole into the lubricant channel via capillary forces.

12. The method of claim 11, wherein the step of forming the hole comprises the step of laser drilling using one of a short-pulse laser and a long-pulse laser.

13. The method of claim 12, further comprising the step of sealing the hole using an energy source, wherein the energy source is one of a short-pulse laser, a long-pulse laser, and an electron beam source.

14. The method of claim 12, further comprising the step of sealing the hole using grease.

15. The method of claim 11, further comprising the step of maintaining a pressure difference between the lubricant channel and the exterior such that the pressure within the lubricant channel is higher than the pressure of the exterior.

16. In a package having a micromechanical device and a processing region for the micromechanical device, a method of delivering a lubricant in gaseous form to the micromechanical device, comprising the steps of:

storing a lubricant in a lubricant channel that is in fluid communication with the processing region, the lubricant channel having a width of 10 μ

m to 800 μ

m and a depth of 10 μ

m to 200 μ

m; and

heating the package.

17. The method of claim 16, wherein an opening of the lubricant channel into the processing region has a cap disposed in the opening, and the cap is made of a material that becomes porous in response to optical radiation or heating.

18. The method of claim 17, further comprising the step of exposing the cap to optical radiation prior to the step of heating.

19. The method of claim 16, wherein the lubricant channel has an open channel configuration.

20. The method of claim 16, wherein a substantial length of the lubricant channel extends into an interior wall of the processing region to be completely enclosed thereby.

21. A method of forming a packaged micromechanical device, the package including a base, an interposer, and a lid, comprising the steps of:

forming a micromechanical device on the base;

bonding the interposer to the base and the lid to the interposer; and

forming a lubricant channel in at least one of the base, interposer, and the lid, wherein the lubricant channel is in fluid communication with a processing region of the micromechanical device.

22. The method of claim 21, wherein the interposer is bonded to the base through an epoxy layer and the lid is bonded to the interposer through an epoxy layer.

23. The method of claim 22, further comprising the step of adding a lubricant into the lubricant channel prior to the step of bonding.

24. The method of claim 23, further comprising the step of inserting a cap in the lubricant channel proximate an opening of the lubricant channel into the processing region.

25. The method of claim 21, further comprising the step of adding a lubricant into the lubricant channel after the step of bonding, wherein the interposer is bonded to the base by a high temperature bonding process and the lid is bonded to the interposer by a high temperature bonding process.