OSCILLATING SCANNING PROBE WITH CONSTANT CONTACT FORCE

• US 20080249737A1
• Filed: 03/17/2008
• Published: 10/09/2008
• Est. Priority Date: 04/03/2007
• Status: Active Grant

• Current Assignee: Hexagon Metrology AB (Hexagon AB)
• Original Assignee: Hexagon Metrology AB (Hexagon AB)
• Inventors: Jordil, Pascal, Pettersson, Bo, Knut, Siercks
• Granted Patent: US 7,779,553 B2
• Time in Patent Office: Days
• US Class Current: 702/152
• CPC Class Codes: G01B 21/04 by measuring coordinates of points
• CPC Class Codes: G01B 3/008 Arrangements for controlling the measuring force

Abstract

A method for scanning a surface of a workpiece using a scanning probe 2 mounted on a support 3 on a coordinate measuring machine 4. The support contains drive means 5, 7 for actuating the movement of the scanning probe 2 relatively to the support 3. The method further involves detecting means 9 to measure a contact force F applied between the tip 10 of the probe and the surface 1, control means 13 coupled to the drive means, and memory means 14 for storing theoretical profiles 19 and coordinates 20 of the surface. This method is characterized by the fact that the control means 13 adjust the actuation of the drive means 5, 7 along a scanning path 18 in order to maintain the contact force 11 within the defined range of values 15 during the whole scanning operation along the scanning path 18.

Claims

1. A method for scanning a surface of a workpiece using a scanning probe mounted on a support on a coordinate measuring machine, said support containing one or more drive actuators for actuating the movement of said scanning probe relatively to said support, a control unit coupled to the drive actuators, and a memory for storing theoretical profiles and coordinates of said surface, said method comprising the steps of:

(i) determine a first range of values for a contact force applied between the tip of said scanning probe and said surface;

(ii) operate said drive actuators to position said tip in contact with said surface;

(iii) operate said positioning machine to move the support along a determined trajectory;

(iv) operate said drive actuators to produce, simultaneously with the relative movement of the support with respect to the surface, movements of said scanning probe relative to the support;

whereby said control unit adjust the actuation of the drive actuators along a scanning path in order to maintain said contact force within said first range of values during the whole scanning operation along said scanning path.

2. The method of claim 1, further comprising the initial step of

(i) loading said theoretical profile of said surface to scan into said memory;

whereby said control unit perform the adjustment of the actuation of said drive actuators along said path according to said theoretical profile.

3. The method of claim 2, wherein said coordinate measuring machine further comprises a contact force sensor to measure the contact force applied between the tip of said probe and said surface, and/or a deflecting force component of said contact force, whereby said control unit adjust the actuation of the drive actuators according to an output of said contact force sensor, in order to maintain said contact force within said first range of values during the whole scanning operation along said scanning path.

4. The method of claim 2, whereby the drive actuators are motors whose torques are adjusted according to an angular position of said probe and/or the position of said probe with respect to the surface, according to said theoretical profile.

5. The method of claim 4, whereby said torques of said motors are derived from an input voltage or current.

6. The method of any of the preceding claims further comprising the step of storing all the instantaneous coordinates along said path in the memory.

7. The method of claim 6, whereby said step of storing all the instantaneous coordinates along said path in the memory is only performed as long as the deflecting force measured by said force sensor remains within a second range of values associated with said first range of values defined for the contact force.

8. The method of claim 3, further comprising the step of modifying said trajectory when the deflecting force according to said force sensor is outside said second range of values.

9. The method of claim 1, whereby a measurement of the deflecting force by said force sensor involves cinematic corrections.

10. The method of claim 1, further comprising a step of real-time correction to bring the measured deflecting force back within said second range of values.

11. The method of claim 1, wherein said coordinate measuring machine and said support comprise encoders providing positioning data of the axes of coordinate measuring machine and said support, the method further comprising a step of sampling said position data of said axes and a step of calculating coordinates of said surface along said scanning path, based on said position data.

12. A computer program product for carrying out the method of claim 1.