MEMS DISPLAY
First Claim
1. A display comprising:
- a plurality of MEMS elements arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows and wherein the subrows of each row are electrically connected; and
wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows.
3 Assignments
0 Petitions
Accused Products
Abstract
A display comprising: a plurality of MEMS elements arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows and wherein the subrows of each row are electrically connected; and wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows. The physical property can be a spring constant associated with a movable mirror, a film thickness, an electrode width, a damping force caused by air between a movable mirror and a fixed mirror, a mass of a movable mirror, a material or geometry of the respective MEMS element.
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Citations
49 Claims
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1. A display comprising:
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a plurality of MEMS elements arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows and wherein the subrows of each row are electrically connected; and wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A displaying system comprising:
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a display comprising a plurality of MEMS elements arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows, wherein the subrows of each row are electrically connected, and wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows; and a processor that is configured to communicate with the display, the processor being configured to process image data. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A method of manufacturing a displaying apparatus, the method comprising:
forming a plurality of MEMS elements arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows, wherein the subrows of each row are electrically connected, and wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A method of displaying data, the method comprising:
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receiving an image data signal; and controlling a plurality of MEMS elements based, at least in part, upon the image data signal; wherein the plurality of MEMS elements are arranged in rows, wherein the MEMS elements of each of the rows are further arranged in subrows, wherein the subrows of each row are electrically connected, and wherein the physical property of at least one MEMS element in at least one subrow is different from the physical property of at least one MEMS element in other subrows. - View Dependent Claims (39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49)
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Specification