Pressure and mechanical sensors using titanium-based superelastic alloy
First Claim
1. A sensor characterized by a deflectable component responsive to a parameter to be sensed and formed of a titanium-based alloy having a Young'"'"'s modulus of less than about 80 GPa and a tensile strength of greater than about 1,000 MPa.
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Accused Products
Abstract
Pressure and mechanical sensors include a sensing component formed of a titanium and tantalum alloy having an elastic (Young'"'"'s) modulus of less than about 80 GPa and a tensile strength of greater than about 1,000 MPa. The high strength and low elastic modulus, together with very low temperature dependence of the elastic modulus and very low linear thermal expansion, result in high resolution and precise measurement over a large temperature range.
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Citations
33 Claims
- 1. A sensor characterized by a deflectable component responsive to a parameter to be sensed and formed of a titanium-based alloy having a Young'"'"'s modulus of less than about 80 GPa and a tensile strength of greater than about 1,000 MPa.
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13. A pressure sensor comprising:
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a first chamber; and a diaphragm positioned adjacent the first chamber, the diaphragm formed of a titanium-based alloy having a Young'"'"'s modulus of less than about 80 GPa and a tensile strength of greater than about 1,000 MPa. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A pressure sensor comprising:
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a sensor body; a diaphragm supported by the sensor body and deflectable as a function of the fluid pressure, the diaphragm having a Young'"'"'s modulus of less than about 80 GPa and a tensile strength of greater than about 1000 MPa; and means for producing an output representative of sensed pressure based upon deflection of the diaphragm. - View Dependent Claims (24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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Specification