APPARATUS AND METHOD FOR ELECTRONIC FUSE WITH IMPROVED ESD TOLERANCE

• US 20080254609A1
• Filed: 10/12/2007
• Published: 10/16/2008
• Est. Priority Date: 12/03/2003
• Status: Active Grant

• Current Assignee: GlobalFoundries, Inc.
• Original Assignee: International Business Machines Corporation
• Inventors: VOLDMAN, Steven H.
• Granted Patent: US 7,943,437 B2
• Time in Patent Office: Days
• US Class Current: 438/601
• CPC Class Codes: H01L 23/5256 comprising fuses, i.e. connections having their state changed from conductive to non-conductive
• CPC Class Codes: H01L 27/0248 for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: Y10T 29/49107 Fuse making
• CPC Class Codes: Y10T 29/49117 Conductor or circuit manufacturing
• CPC Class Codes: Y10T 29/49124 On flat or curved insulated base, e.g., printed circuit, etc.
• CPC Class Codes: Y10T 29/49128 Assembling formed circuit to base
• CPC Class Codes: Y10T 29/49155 Manufacturing circuit on or in base

Abstract

Method of making an electronic fuse blow resistor structure. In one embodiment, the method includes forming an insulator film, depositing a conductor on the insulator film, and after the depositing, etching the conductor to form a plurality of spaced apart non-conductive regions and a plurality of spaced-apart conductive regions. In another embodiment, the method includes forming the insulator film, forming a conductive sheet, and sub-dividing the conductive sheet into the plurality of conductive regions.

Claims

1. A method of making an electronic fuse blow resistor structure, comprising:

forming an insulator film;

depositing a conductor on the insulator film; and

after the depositing, etching the conductor to form a plurality of spaced apart non-conductive regions and a plurality of spaced-apart conductive regions.

2. The method of claim 1, further comprising forming a first fuse lead in electrical communication with a first end of the plurality of spaced-apart conductive regions and a second fuse lead in electrical communication with a second end of the plurality of spaced-apart conductive regions.

3. The method of claim 2, further comprising forming at least one electrical contact in electrical communication with the first fuse lead and at least one electrical contact in electrical communication with the second fuse lead.

4. The method of claim 1, wherein the plurality of conductive regions comprises a metal.

5. The method of claim 1, wherein the electronic fuse resistor structure comprises a programmable electronic fuse arranged on a resistive insulator film.

6. The method of claim 1, wherein the insulator film comprises a polysilicon film.

7. The method of claim 1, wherein the insulator film comprises a resistive film that forms a resistive element.

8. The method of claim 1, further comprising forming by deposition fuse leads arranged on opposite sides of and in electrical contact with the plurality of spaced-apart conductive regions.

9. The method of claim 1, wherein the plurality of spaced-apart conductive regions comprise a thickness of 100 to 400 Å

.

10. The method of claim 1, wherein the plurality of spaced-apart conductive regions are configured to provide digitized resistance.

11. The method of claim 1, wherein each non conductive region comprises a region at least partially filled with a solid, liquid, or semi-solid non-conductive material.

12. The method of claim 1, wherein each non conductive region comprises a porous material.

13. The method of claim 1, wherein each non conductive region comprises a combination of a gas, a liquid, and a solid.

14. The method of claim 1, wherein the plurality of spaced-apart conductive regions comprise a uniform width and are arranged approximately parallel to one another.

15. The method of claim 1, wherein the plurality of spaced-apart conductive regions comprise salicided regions.

16. A method of making an electronic fuse blow resistor structure comprising an insulating film and a plurality of spaced-apart conductive regions arranged on the insulating film, the method comprising:

forming the insulator film;

forming a conductive sheet; and

sub-dividing the conductive sheet into the plurality of conductive regions.

17. The method of claim 16, further comprising forming a first fuse lead in electrical communication with a first end of the plurality of spaced-apart conductive regions and a second fuse lead in electrical communication with a second end of the plurality of spaced-apart conductive regions.

18. The method of claim 17, further comprising forming at least one electrical contact in electrical communication with the first fuse lead and at least one electrical contact in electrical communication with the second fuse lead.

19. The method of claim 16, wherein the plurality of spaced-apart conductive regions comprises a metal.

20. The method of claim 16, wherein the electronic fuse resistor structure comprises a programmable electronic fuse arranged on a resistive insulator film.