ELECTRON/HOLE TRANSPORT-BASED NEMS GYRO AND DEVICES USING THE SAME

• US 20080257041A1
• Filed: 04/17/2007
• Published: 10/23/2008
• Est. Priority Date: 04/17/2007
• Status: Active Grant

• Current Assignee: UT-Battelle LLC
• Original Assignee: UT-Battelle LLC
• Inventors: Datskos, Panos
• Granted Patent: US 7,552,636 B2
• Time in Patent Office: Days
• US Class Current: 73/504.02
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
• CPC Class Codes: G01C 19/5719 using planar vibrating masses driven in a translation vibration along an axis

Abstract

A nanomechanical (NEMS) gyroscope includes an integrated circuit substrate, a pair of spaced apart contact pads disposed on the substrate, and a movable nanoscale element forming at least a portion of a first electrically conductive path electrically coupling the contact pads. The movable element experiences movement comprising rotation, changes in rotation, or oscillation upon the gyroscope experiencing angular velocity or angular acceleration. Movement of the gyro introduces geometrically induced phase changes which results in phase and/or frequency changes in ac current flowing through the movable element. An inertial measurement unit (IMU) can include an integrated circuit substrate having a three axis gyroscope formed on the substrate and a three axis accelerometer, which is preferably formed on the same substrate.

Claims

1. A nanomechanical (NEMS) gyroscope, comprising:

an integrated circuit substrate;

a pair of spaced apart contact pads disposed on said substrate, and

a movable nanoscale element forming at least a portion of a first electrically conductive path electrically coupling said contact pads, wherein said movable element experiences movement comprising rotation, changes in rotation, or oscillation upon said gyroscope experiencing angular velocity or angular acceleration, said movement inducing phase changes in current flow through said movable element.

2. The gyroscope of claim 1, wherein said gyroscope is a three axis gyroscope comprising three of said gyroscopes, said gyroscopes positioned such that a measuring axis for each of said gyroscopes is orthogonal to a measuring axis for other of said gyroscopes.

3. The gyroscope of claim 1, wherein said movable element comprises a suspended nanoconstriction.

4. The gyroscope of claim 3, wherein said nanoconstriction is <

50 nm wide.

5. The gyroscope of claim 1, wherein said gyroscope comprises an interferometric arrangement comprising said first electrically conductive path and at least a second fixed electrically conductive pathway both coupling said contact pads.

6. The gyroscope of claim 5, wherein said second pathway is secured to said substrate.

7. An inertial measurement unit (IMU), comprising:

a three axis accelerometer for detecting acceleration and decelleration for all three orthogonal measuring axes, and

a three axis gyroscope formed on an integrated circuit substrate, said gyroscope for measuring rotational rates along all three orthogonal rotational axes, said gyroscope comprising;

a movable nanoscale element forming at least a portion of a first electrically conductive path electrically coupling said contact pads, wherein said movable element experiences movement comprising rotation, changes in rotation, or oscillation upon said gyroscope experiencing angular velocity or angular acceleration, said movement inducing phase changes in current flow through said movable element.

8. The IMU of claim 7, further comprising a GPS circuit.

9. The IMU of claim 8, wherein said accelerometer and said GPS are disposed on said substrate.

10. The IMU of claim 7, further comprising:

a gyro logic circuit on said substrate responsive to said three-axis gyroscope for producing an inertial angular rate about said 3 axes;

an accelerometer logic circuit on said substrate responsive to said three-axis accelerometer assembly for producing a non-gravitational acceleration along each accelerometer input axis; and

a processor on said substrate responsive to said gyroscope logic circuit and said accelerometer logic circuit for determining attitude and position.

11. The IMU of claim 7, wherein said movable element comprises a nanoconstriction.

12. The IMU of claim 7, wherein said nanoconstriction is <

50 nm wide.

13. The IMU of claim 7, wherein said gyroscope comprises an interferometric arrangement comprising said first electrically conductive path and at least a second fixed electrically conductive pathway both coupling said contact pads.

14. The gyroscope of claim 13, wherein said second pathway is secured to said substrate.

15. A method for detecting angular velocity or angular acceleration, comprising the steps of:

forcing an alternating current through a nanomechanical (NEMS) gyroscope comprising an integrated circuit substrate, a pair of spaced apart contact pads disposed on said substrate, and a movable nanoscale element forming at least a portion of a first electrically conductive path electrically coupling said contact pads,

measuring a change in at least one parameter of said alternating current resulting from rotation or oscillation of said suspended element upon angular velocity or angular acceleration of said gyroscope, said oscillation or rotation inducing phase changes in current flowing through said suspended element, and

determining said angular velocity or angular acceleration from said parameter.