Vibration Damper for Isolator

• US 20080258365A1
• Filed: 05/09/2005
• Published: 10/23/2008
• Est. Priority Date: 05/14/2004
• Status: Abandoned Application

• Current Assignee: Koninklijke Philips N.V.
• Original Assignee: Koninklijke Philips Electronics N.V. (Koninklijke Philips N.V.)
• Inventors: Vroomen, Hubert Gerard Jean Joseph Amaury, Van De Sande, Henricus Johannes Adrianus
• Application Number:
  US11/568,989
• Publication Number:
  US 20080258365A1
• Time in Patent Office: Days
• US Class Current: 267/140.14
• CPC Class Codes: F16F 15/0232 with at least one gas spring F16F15/027 takes precedence
• CPC Class Codes: F16F 2230/105 Flexible, e.g. bellows or bladder
• CPC Class Codes: G03F 7/70808 Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
• CPC Class Codes: G03F 7/70833 Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

A system for use in for example the production of semiconductors comprises a chamber (10) having a sealed inner space (11), such as a vacuum chamber. A heavy mass (14), such as a table, is arranged within the vacuum chamber and is supported or carried by one or more vibration dampers or isolators (15). Each vibration isolator comprises a hollow or tubular member (18) having an open inner end portion, which extends into the sealed space of the chamber (10). A support structure (21) is arranged at the inner end of the hollow member for supporting the mass or table (14). The opposite ends of a bellows (24) are sealingly connected to the hollow member (18) and the support structure (21), respectively, so as to seal the inner space (26) of the hollow member (18) from the inner space (11) of the chamber (10). A surface part of the support structure is exposed to a to a gas pressure different from that of the sealed inner space of the chamber, so as to at least partly balance the weight of the support structure (21) and the mass or payload (14) supported thereby.

Claims

1. A system comprising a chamber (10) defining a sealed inner space (11) and at least one vibration damper or isolator (15) for supporting a mass or payload (14) arranged within said space, said vibration damper comprising:

a hollow member (18) having an open inner end portion extending into the sealed space of the chamber,

a support structure (21) for supporting said mass,

a bellows (24) having its opposite ends sealingly connected to the hollow member and the support structure, respectively, so as to seal the inner space (26) of the hollow member from the inner space of the chamber, and

means (20) for exposing a surface part of the support structure to a gas pressure different from that of the sealed inner space of the chamber, so as to at least partly balance the weight of the support structure and said mass supported thereby.

2. A system according to claim 1, wherein the chamber contains gas at a sub atmospheric pressure.

3. A system according to claim 1, wherein the bellows is of a type allowing mutual movement of its opposite ends in the axial direction as well as a mutual translational movement in any radial direction of the bellows.

4. A system according to claim 1, wherein the bellows is of a type allowing restricted rotational movements around any radially extending axis in a cross-sectional plane of the bellows.

5. A system according to claim 1, wherein the support structure (21) comprises a base member (22) to which one end of the bellows is connected, and a mass supporting member (27), which is supported by the base member via spring members (28) allowing restricted rotational movement thereof in relation to the base member.

6. A system according to claim 5, wherein the spring members comprise leaf springs.

7. A system according to claim 1, further comprising an active electronic vibration isolating circuit (31, 34, 35) for assisting in counteracting vibrational movements of the support structure.

8. A system according to claim 7, wherein the electronic vibration isolating circuit comprises one or more actuators (31) and/or sensors (34, 35) arranged inside the hollow member.

9. A vibration isolator or damper for a system according to claim 1, said vibration damper comprising:

a hollow member (18) having an end portion for extending into the sealed space (11) of the chamber (10),

a support structure (21) arranged at said end portion of the hollow member for supporting said mass or payload (14), and

a bellows (24) having its opposite ends sealingly connected to the hollow member and the support structure, respectively.

10. A vibration isolator according to claim 9, wherein the bellows is of a type allowing mutual movement of its opposite ends in the axial direction as well as a mutual translational movement in any radial direction of the bellows.

11. A vibration isolator according to claim 9, wherein the bellows is of a type allowing restricted rotational movements around any radially extending axis in a cross-sectional plane of the bellows.

12. A vibration isolator according to claim 9, wherein the support structure comprises a base member (22) to which the bellows is connected, and an mass support member (27), which is supported by the base member via spring members (28) allowing restricted rotational movement thereof in relation to the base member.

13. A vibration isolator according to claim 12, wherein the spring members comprise leaf springs.

14. A vibration isolator according to claim 9, further comprising an active electronic vibration isolating circuit (31, 34, 35) for assisting in counteracting vibrational movements of the support structure.

15. A vibration isolator according to claim 14, wherein the electronic vibration isolating circuit comprises one or more actuators (31) and/or sensors (34, 35) arranged inside the hollow member.

16. A vibration isolator according to claim 9, wherein opposite abutment surfaces (22) defined by the support structure and by the hollow member, respectively, may co-operate so as to limit relative movement of the support structure.

17. A vibration isolator according to claim 9, wherein at least part of the length of the bellows extends along and adjacent to a length of a peripheral surface of the hollow member.

18. A vibration isolator according to claim 9, wherein the bellows is made from metal.