OPTICAL ACTUATOR WITH IMPROVED RESPONSE TIME AND METHOD OF MAKING THE SAME
First Claim
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1. A method of making an optical actuator, said method comprising the steps of:
- adhering a substrate to an actuator using an adhesive material, the substrate having a surface;
removing deformities from the surface of the substrate after the adhesive material has cured; and
applying an optical coating to the surface of the substrate after the deformities in the surface have been removed.
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Abstract
An optical actuator having an improved response time and an improved frequency operational range due to the reduced mass of a substrate coupled to an actuator and method of making the same. The optical actuator may be formed by adhering an uncoated substrate to the actuator using an epoxy. Once cured, any deformities and irregularities in a top surface of the substrate are removed. An optical coating is then applied to the top surface of the substrate. Once finished, the optical actuator may be used in a laser resonating cavity. Further, the optical actuator desirably may have a resonant frequency of about 150 kHz.
93 Citations
47 Claims
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1. A method of making an optical actuator, said method comprising the steps of:
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adhering a substrate to an actuator using an adhesive material, the substrate having a surface; removing deformities from the surface of the substrate after the adhesive material has cured; and applying an optical coating to the surface of the substrate after the deformities in the surface have been removed. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of making an optical actuator, said method comprising the steps of:
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adhering a substrate to an actuator using an adhesive material, the substrate having a surface; removing any deformities from the surface of the substrate; and applying an optical coating to the surface of the substrate for wavelength specific applications. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. An optical actuator for use in a light resonating cavity, said optical actuator comprising:
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an actuator; a substrate bonded to the actuator, the substrate having a surface, an effective aperture, and a thickness; an optical coating disposed on the surface of the substrate; and wherein the size of the effective aperture of the substrate is greater than four times the thickness of the substrate. - View Dependent Claims (35, 36, 37, 38, 39, 40)
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41. A laser apparatus comprising:
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a light resonating cavity having an optical path length; and an optical actuator for varying the optical path length of the light resonating cavity to thereby maintain resonance in the laser cavity; and wherein said optical actuator has a resonant frequency exceeding 30 kHz. - View Dependent Claims (42, 43, 44, 45, 47, 46)
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Specification