BATCH SUBSTRATE HANDLING
First Claim
Patent Images
1. A vacuum handling robot comprising:
- a base having a center axis;
a first robotic arm rotatably coupled to the base including a single-substrate end effector; and
a second robotic arm rotatably coupled to the base, the second robotic arm including a batch end effector including a plurality of vertically-stacked end effectors in a fixed orientation relative to one another.
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Abstract
A substrate-handling vacuum robot includes a first robotic arm with a single-substrate end effector and a second robotic arm with a batch end effector. The single-substrate end effector permits single-substrate pick-and-place operations while the batch end effector permits batch handling of substrates within a vacuum environment.
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Citations
17 Claims
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1. A vacuum handling robot comprising:
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a base having a center axis; a first robotic arm rotatably coupled to the base including a single-substrate end effector; and a second robotic arm rotatably coupled to the base, the second robotic arm including a batch end effector including a plurality of vertically-stacked end effectors in a fixed orientation relative to one another. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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Specification