Method for Fabricating a Long-Range Ordered Periodic Array of Nano-Features, and Articles Comprising Same

• US 20080260941A1
• Filed: 01/23/2006
• Published: 10/23/2008
• Est. Priority Date: 01/21/2005
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Jin, Sungho
• Granted Patent: US 8,178,165 B2
• Time in Patent Office: Days
• US Class Current: 427/126.4
• CPC Class Codes: B01J 23/40 of the platinum group metals
• CPC Class Codes: B01J 35/23 in a colloidal state
• CPC Class Codes: B01J 37/0009 Use of binding agents; Moulding; Pressing; Powdering; Granulating; Addition of materials ameliorating the mechanical properties of the product catalyst
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 25/00 Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: G06N 10/00 Quantum computing, i.e. information processing based on quantum-mechanical phenomena
• CPC Class Codes: G11B 5/855 Coating only part of a support with a magnetic layer
• CPC Class Codes: H01F 1/009 bidimensional, e.g. nanoscale period nanomagnet arrays H01F10/007 takes precedence
• CPC Class Codes: H01F 1/405 of IV type, e.g. Ge1-xMnx
• CPC Class Codes: Y10S 977/849 with scanning probe
• CPC Class Codes: Y10S 977/855 for manufacture of nanostructure
• CPC Class Codes: Y10S 977/858 including positioning/mounting nanostructure

Abstract

A long range, periodically ordered array of discrete nano-features (10), such as nano-islands, nano-particles, nano-wires, non-tubes, nano-pores, nano-composition-variations, and nano-device-components, are fabricated by propagation of a self-assembling array or nucleation and growth of periodically aligned nano-features. The propagation may be induced by a laterally or circularly moving heat source, a stationary heat source arranged at an edge of the material to be patterned (12), or a series of sequentially activated heaters or electrodes. Advantageously, the long-range periodic array of nano-features (10) may be utilized as a nano-mask or nano-implant master pattern for nano-fabrication of other nano-structures. In addition, the inventive long-range, periodically ordered arrays of nano-features are useful in a variety of nanoscale applications such as addressable memories or logic devices, ultra-high-density magnetic recording media, magnetic sensors, photonic devices, quantum computing devices, quantum luminescent devices, and efficient catalytic devices.

Claims

1. A nanoscale patterning method, comprising the steps of:

disposing a material to be patterned on a substrate, wherein the material includes an ordered region of periodically arranged nano-features; and

actuating the material to induce an expansion of the ordered region, thereby patterning the material with a long-range ordered periodic array of nano-features.

2. The method of claim 1, wherein the actuating step comprises laterally moving a heat source relative to the material at a constant sweeping speed.

3. The method of claim 1, wherein the actuating step comprises circularly moving a heat source relative to the material at a constant sweeping speed.

4. The method of claim 1, wherein the actuating step comprises causing a temperature gradient from a stationary heat source arranged at an edge of the material.

5. The method of claim 1, wherein the actuating step comprises sequentially activating a series of stationary heaters arranged above the material to be patterned.

6. The method of claim 1, wherein the actuating step comprises moving a heat source relative to the anode material at a non-uniform sweeping speed.

7. The method of claim 1, wherein the expansion comprises a propagating nucleation and growth of the ordered region.

8. The method of claim 1, wherein each nano-feature of the long-range ordered periodic array has a diameter of at most approximately 100 nm.

9. The method of claim 1, wherein the periodic spacing between the nano-features of the long-range ordered periodic array is at most approximately 100 nm.

10. The method of claim 1, wherein an area of the long-range ordered periodic array of nano-features is at least approximately 1 mm².

11. The method of claim 1, wherein the long-range ordered periodic array includes a percentage of non-periodic defects is less than approximately 5% of the total array.

12. A nanoscale electrochemical patterning method, comprising the steps of:

disposing an anode material to be patterned on a substrate;

actuating the anode material with a cathode actuator to induce a propagating nucleation and growth of periodically aligned nano-pores; and

forming a long-range ordered periodic array of nano-pores in the anode material.

13. The method of claim 12, wherein the anode material is selected from a group consisting of Al, Ti, and Si.

14. The method of claim 12, wherein the anode material comprises an anodized aluminum oxide membrane.

15. The method of claim 12, wherein the actuating step comprises laterally moving the cathode actuator relative to the anode material at a constant sweeping speed.

16. The method of claim 12, wherein the actuating step comprises circularly moving the cathode actuator relative to the anode material at a constant sweeping speed.

17. The method of claim 12, wherein the actuating step comprises sequentially activating a series of stationary cathode actuators arranged above the anode material to be patterned.

18. The method of claim 12, wherein the actuating step comprises moving the cathode actuator relative to the anode material at a non-uniform sweeping speed.

19. The method of claim 12, wherein each nano-pore of the long-range ordered periodic array has a diameter of at most approximately 100 nm.

20. The method of claim 12, wherein the periodic spacing between the nano-pores of the long-range ordered periodic array is at most approximately 100 nm.

21. The method of claim 12, wherein an area of the long-range ordered periodic array of nano-pores is at least approximately 1 mm².

22. The method of claim 12, wherein the long-range ordered periodic array includes a percentage of non-periodic defects is less than approximately 5% of the total array.

23. A nanoscale electrochemical patterning method, comprising the steps of:

disposing an anode material to be patterned on a substrate;

moving a narrow area cathode actuator in a fast sweeping motion along the anode material to produce a plurality of periodically aligned shallow seed anodization spots in the anode material; and

exposing the anode material to a broad area cathode actuator to propagate the shallow seed anodization spots deeper into the substrate to form a long-range periodic array of deep nano-pores.

24. A nanoscale patterning method, comprising the steps of:

coating a colloidal solution on a substrate, wherein the colloidal solution comprises a plurality of self-assembling nano-particles and a surfactant diluted in a solvent; and

actuating the colloidal solution to evaporate the solvent, thereby allowing the plurality of self-assembling nano-particles to assemble into a long-range ordered periodic array of nano-features.

25. The method of claim 24, wherein the actuating step comprises laterally moving a heat source relative to the colloidal solution at a constant sweeping speed.

26. The method of claim 24, wherein the actuating step comprises circularly moving a heat source relative to the colloidal solution at a constant sweeping speed.

27. The method of claim 24, wherein the actuating step comprises causing a temperature gradient from a stationary heat source arranged at an edge of the colloidal solution.

28. The method of claim 24, wherein the actuating step comprises sequentially activating a series of stationary heaters arranged above the colloidal solution.

29. The method of claim 24, wherein the actuating step comprises moving a heat source relative to the colloidal solution at a non-uniform sweeping speed.

30. The method of claim 24, wherein the colloidal solution is subdivided into a plurality of regions.

31. A nanoscale patterning method, comprising the steps of:

applying a layer of diblock copolymer solution to a substrate, wherein the diblock copolymer solution comprises a pair of phase-separated, self-assembling polymers diluted in a solvent; and

actuating the diblock copolymer solution to evaporate the solvent, thereby propagating allowing the phase-separated polymers to assemble into a long-range ordered periodic array of nano-rods.

32. The method of claim 31, wherein the actuating step comprises laterally moving a heat source relative to the diblock copolymer layer at a constant sweeping speed.

33. The method of claim 31, wherein the actuating step comprises circularly moving a heat source relative to the diblock copolymer layer at a constant sweeping speed.

34. The method of claim 31, wherein the actuating step comprises causing a temperature gradient from a stationary heat source arranged at an edge of the diblock copolymer layer.

35. The method of claim 31, further comprising the step of etching the array of nano-rods to produce a long-range ordered periodic array of nano-cavities in the diblock copolymer layer.

36. The method of claim 35, further comprising the step of filling the nano-cavities with a filling material.

37. The method of claim 31, wherein the pair of phase-separated, self-assembling copolymers is selected from a group consisting of a polystyrene-polybutadiene pair and a polystyrene-polyisoprene pair.

38-60. -60. (canceled)