Systems and methods for measuring temperature

• US 20080262773A1
• Filed: 01/08/2008
• Published: 10/23/2008
• Est. Priority Date: 04/18/2007
• Status: Abandoned Application

• Current Assignee: Exatron, Inc,
• Original Assignee: Exatron, Inc,
• Inventors: Howell, Robert L.
• Application Number:
  US12/008,147
• Publication Number:
  US 20080262773A1
• Time in Patent Office: Days
• US Class Current: 702/99
• CPC Class Codes: G01K 15/00 Testing or calibrating of thermometers
• CPC Class Codes: G01K 7/32 using change of resonant frequency of a crystal

Abstract

Systems and methods for determining a temperature sensitivity of a MEMS device are disclosed. An exemplary method includes determining a temperature response of a MEMS device at an arbitrary temperature and calibrating the MEMS device based on the temperature response.

Claims

1. A method comprising:

determining a temperature response of a MEMS device at an arbitrary temperature; and

calibrating the MEMS device based on the temperature response.

2. The method of claim 1, wherein determining the temperature response of the MEMS device comprises determining a power input, frequency input and frequency output of the MEMS device.

3. The method of claim 1, wherein determining the temperature response comprises determining a transient frequency response of the MEMS device based on the frequency input and the frequency output of the MEMS device.

4. The method of claim 1, wherein the arbitrary temperature is room temperature.

5. The method of claim 1, wherein determining the temperature response comprises heating the MEMS device.

6. A method comprising:

determining a frequency response of a MEMS device;

determining polynomials of a quadratic equation representative of the frequency response of the MEMS device as a function of temperature; and

calibrating the MEMS device using the quadratic equation.

7. The method of claim 6, wherein determining a frequency response comprises determining a power input, a frequency input and a frequency output of the MEMS device.

8. The method of claim 6, wherein determining a frequency response of the MEMS device comprises determining a transient frequency response of the MEMS device.

9. A method comprising:

measuring a transient frequency response and power of a MEMS device;

calibrating a temperature sensitivity of the MEMS device using the transient frequency response.

10. The method of claim 9, wherein measuring the transient frequency response of the MEMS device comprises measuring a frequency input and a frequency output during a predetermined amount of time.

11. The method of claim 10, wherein the predetermined amount of time is less than about eight seconds.

12. The method of claim 10, wherein the predetermined amount of time is less than about two seconds.

13. The method of claim 9, wherein measuring the transient frequency response of the MEMS device comprises heating the MEMS device.

14. A method comprising:

testing a MEMS device in a test fixture;

trimming the MEMS device in the test fixture;

specifying the MEMS device in the test fixture; and

verifying the MEMS device in the test fixture.

15. The method of claim 14, wherein trimming the MEMS device in the test fixture comprises:

determining a frequency response of the MEMS device;

determining polynomials of a quadratic equation representative of the frequency response of the MEMS device as a function of temperature; and

calibrating the MEMS device using the quadratic equation.

16. The method of claim 14, wherein trimming the MEMS device in the test fixture comprises:

measuring a transient frequency response and power of the MEMS device;

calibrating a temperature sensitivity of the MEMS device using the transient frequency response.

17. The method of claim 14, wherein trimming the MEMS device in the test fixture comprises heating the MEMS device.

18. A system comprising:

a text fixture to receive a MEMS device;

a power input coupled to the test fixture;

a frequency input coupled to the test fixture;

a frequency output coupled to the test fixture; and

a processor to measure the power input, frequency input and frequency output and determine a temperature sensitivity of the MEMS device based on the power input, frequency input and frequency output.

19. The system of claim 18, wherein the processor is to measure the power input, frequency input and frequency output at an arbitrary temperature.

20. The system of claim 18, wherein the text fixture is heatable.

21. The system of claim 18, wherein the text fixture is configured to heat the MEMS device.