CHARGED PARTICLE BEAM APPARATUS

• US 20080265158A1
• Filed: 04/16/2008
• Published: 10/30/2008
• Est. Priority Date: 04/24/2007
• Status: Abandoned Application

• Current Assignee: SII Nano Technology Inc. (Hitachi, Ltd.)
• Original Assignee: SII Nano Technology Inc. (Hitachi, Ltd.)
• Inventors: Iwasaki, Kouji
• Application Number:
  US12/104,160
• Publication Number:
  US 20080265158A1
• Time in Patent Office: Days
• US Class Current: 250/310
• CPC Class Codes: G01N 23/2251 using incident electron beams, e.g. scanning electron microscopy [SEM]
• CPC Class Codes: H01J 2237/0203 Protection arrangements
• CPC Class Codes: H01J 2237/20 Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
• CPC Class Codes: H01J 2237/304 Controlling tubes
• CPC Class Codes: H01J 2237/3174 Etching microareas
• CPC Class Codes: H01J 37/302 Controlling tubes by external information, e.g. programme control H01J37/304 takes precedence
• CPC Class Codes: H01J 37/3056 for microworking, e.g. etching of gratings, trimming of electrical components trimming of resistors H01C17/22

Abstract

A charged particle beam instrument is offered which comprises an irradiation mechanism for irradiating a sample with a charged particle beam (FIB/EB), a detection mechanism for detecting secondary charged particles produced by the irradiation by the charged particle beam, a storage portion for previously storing three-dimensional data about the irradiation mechanism and detection mechanism in an interrelated manner to the stage coordinate system W, a conversion portion for converting three-dimensional data about the sample into the stage coordinate system, and a decision portion for simulating the positional relationships among the sample, irradiation mechanism, and detection mechanism based on data converted by the conversion portion and on data stored in the storage portion when a certain position on the sample is placed into a measurement point and for previously making a decision as to whether the sample will interfere and making a report of the result of the decision.

Claims

1. A charged particle beam apparatus comprising:

a sample table on which a sample is placed;

a stage for displacing the sample table to bring a certain position of the sample into a measurement point;

an irradiation mechanism for irradiating the certain point of the sample with a charged particle beam;

a detection mechanism for detecting secondary charged particles produced by the irradiation of the charged particle beam;

a display mechanism for creating image data about the sample based on the detected secondary charged particles, the display mechanism having a display portion for displaying the image data as a sample image;

a storage portion for previously storing three-dimensional data about the irradiation mechanism and about the detection mechanism such that the three-dimensional data are interrelated with a stage coordinate system for the stage;

a conversion portion for converting previously entered three-dimensional data about the sample into the stage coordinate system based on a posture and a position of the placed sample; and

a decision portion for making a decision in advance as to whether the sample will interfere by making a simulation of positional relationships among the sample, the irradiation mechanism, and the detection mechanism based on data converted by the conversion portion and on data stored in the storage portion when the certain position of the sample is brought into the measurement point, the decision portion also reporting results of the decision.

2. A charged particle beam apparatus according to claim 1, wherein said conversion portion is equipped with a data acquisition portion for optically observing the sample and previously acquiring the three-dimensional data about the sample.

3. A charged particle beam apparatus according to claim 1, wherein said decision portion displays results of the simulation as a three-dimensional image on said display portion.

4. A charged particle beam apparatus according to claim 1, wherein said decision portion locks said stage when the decision portion has judged that there will be interference.

5. A charged particle beam apparatus according to claim 1, wherein said decision portion makes a report of a movable range of the stage in which it is displaceable immediately before interference takes place.

6. A charged particle beam apparatus according to claim 1,

wherein said stage has an XYZ moving mechanism (i) for moving the sample table along X- and Y-axes which are parallel to a horizontal plane and perpendicular to each other and along a Z-axis perpendicular to the X- and Y-axes, (ii) a rotation mechanism for rotating the sample table about the Z-axis, and (iii) a tilt mechanism for rotating the sample table about the X-axis or Y-axis, and

wherein said decision portion makes a report of orders of operations and operation times of the XYZ moving mechanism, the rotation mechanism, and tilt mechanism to place the certain position on the sample into said measurement point in the shortest time when said decision portion has determined that there will be no interference.

7. A charged particle beam apparatus according to claim 1,

wherein said stage has an XYZ moving mechanism (i) for moving the sample table along X- and Y-axes which are parallel to a horizontal plane and perpendicular to each other and along a Z-axis perpendicular to the X- and Y-axes, (ii) a rotation mechanism for rotating the sample table about the Z-axis, and (iii) a tilt mechanism for rotating the sample table about the X-axis or Y-axis, and

wherein said decision portion operates the XYZ moving mechanism, the rotation mechanism, and the tilt mechanism to place the certain position on the sample into said measurement point in the shortest time when the decision portion has determined that there will be no interference.