Microfabricated miniature grids
First Claim
Patent Images
1. An integrated microfabricated grid for controlling a charged particle stream, the grid formed of a plurality of electrically isolated conductive elements, comprising:
- a substrate to serve as a support for said conductive elements at one of an end thereof, or at another support location within the grid;
a hole in the substrate to allow the charged particle stream to pass therethrough; and
the conductive elements lying in a common plane with one another, and formed from a microfabricated, integral layer disposed adjacent the substrate, the conductive elements having at least one dimension of 10 micrometers (um) or less.
1 Assignment
0 Petitions
Accused Products
Abstract
A grid structure and method for manufacturing the same. The grid is used for gating a stream of charged particles in certain types of particle measurement instruments, such as ion mobility spectrometers and the like. The methods include various microfabrication techniques for etching and/or depositing grid structure materials on a silicon substrate.
17 Citations
13 Claims
-
1. An integrated microfabricated grid for controlling a charged particle stream, the grid formed of a plurality of electrically isolated conductive elements, comprising:
-
a substrate to serve as a support for said conductive elements at one of an end thereof, or at another support location within the grid; a hole in the substrate to allow the charged particle stream to pass therethrough; and the conductive elements lying in a common plane with one another, and formed from a microfabricated, integral layer disposed adjacent the substrate, the conductive elements having at least one dimension of 10 micrometers (um) or less. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
Specification