Magnetic Levitation Lithography Apparatus and Method

• US 20080266037A1
• Filed: 05/20/2005
• Published: 10/30/2008
• Est. Priority Date: 06/17/2004
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Williams, Mark
• Application Number:
  US11/629,224
• Publication Number:
  US 20080266037A1
• Time in Patent Office: Days
• US Class Current: 335/219
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H02N 15/00 Holding or levitation devices using magnetic attraction or repulsion, not otherwise provided for electric or magnetic devices for holding work on machine tools B23Q3/15 ; monorail vehicle propulsion or suspension B60L13/00; sliding or levitation devices for railway systems B61B13/08; material handling devices associated with conveyors incorporating devices with electrostatic or magnetic grippers B65G47/92; separating thin or filamentary articles from piles using magnetic force B65H3/16; delivering thin or filamentary articles from magnetic holders by air blast or suction B65H29/24; bearings using magnetic or electric supporting means F16C32/04; relieving bearing loads using magnetic means F16C39/06; magnets H01F7/00; dynamo-electric clutches or brakes H02K49/00 ; electric furnaces with simultaneous levitation and heating H05B6/32

Abstract

A magnetic levitation lithography machine having a low spring stiffness to minimize disturbances of the first structure and which is capable of dynamically controlling the first structure in one or more degrees of freedom. The machine includes a radiation source, a patterning element configured to define a pattern, a projection element, the projection element configured to project the pattern onto a substrate when radiation from the radiation source is projected through the projection element; and a substrate take configured to support the substrate. The substrate take includes a second structure, a fine stage, and a magnetic support configured to support the fine stage adjacent the second structure. The magnetic support includes a first magnet element, coupled to the fine stage, having a first magnet polarization, a second magnet element, coupled to the course stage, having a second magnet polarization, the first magnet element being separated from the second magnet element by a gap, and an adjustment mechanism configured to adjust the magnetic force used to support the fine stage by varying the gap between the first magnet element and the second magnet element.

Claims

1. An apparatus, comprising:

a second structure;

a first structure; and

a magnetic support configured to support the first structure adjacent the second structure, the magnetic support including;

a first magnet element, coupled to the first structure, having a first magnet polarization;

a second magnet element, coupled to the second structure, having a second magnet polarization perpendicular to the first magnet polarization, the first magnet element being separated from the second magnet element by a gap; and

an adjustment mechanism being configured to adjust the magnetic force used to support the first structure by varying the gap between the first magnet element and the second magnet element.

2. The apparatus of claim 1, wherein the first magnet element generates the magnetic force in the direction to support the first structure adjacent the second structure.

3. The apparatus of claim 1 wherein the first magnet element is configured to move in a vertical direction to support the first structure adjacent the second structure.

4. The apparatus of claim 1, wherein the second magnet element is stationary and the first magnet element is shaped as a plunger and is configured to move relative to the stationary second magnet.

5. The apparatus of claim 1, wherein the magnetic force is created by the magnetic interaction of the first magnet and the second magnet.

6. The apparatus of claim 1, wherein the first magnet element is configured to have a magnetic polarization that is oriented to be substantially in parallel with the magnetic force applied to the first structure.

7. The apparatus of claim 1, wherein the first magnet element is configured to have a magnetic polarization that is oriented to be substantially in anti-parallel with the magnetic force applied to the first structure.

8. The apparatus of claim 1, wherein the first magnet element is configured to have a magnet polarization that is oriented to be substantially orthogonal with the magnetic force applied to the first structure.

9. The apparatus of claim 1, wherein the second magnet element is annular in shape and substantially surrounds the first magnet element.

10. The apparatus of claim 1, wherein the second magnet element comprises a plurality of magnet segments, the magnet segments being symmetrically arranged around the first magnet element.

11. The apparatus of claim 10, wherein the adjustment mechanism is configured to radially adjust the magnet segments to vary the gap between the first magnet element and the magnet segments of the second magnet element.

12. The apparatus of claim 10, wherein each magnet segment includes an adjusting pin, a magnet, and a mount configured to hold the magnet and adjusting pin together.

13. The apparatus of claim 12, wherein the second magnet element further comprises an annular ring configured to substantially surround the first magnet element, the annular ring including gap adjustment grooves configured to engage the adjusting pins of the magnet segments respectively.

14. The apparatus of claim 13, wherein the second magnet element further comprises a clamping element configured to clamp the magnet segments in the gap adjustment grooves after the gap is adjusted.

15. The apparatus of claim 1, wherein the magnetic force applied to the first structure increases as the gap decreases and vice-versa.

16. The apparatus of claim 1, wherein the second magnet element is configured to have a magnet polarization that is oriented to be substantially orthogonal with the magnetic force applied to the first structure.

17. The apparatus of claim 1, wherein the second magnet element is configured to have a magnet polarization that is orientated to be substantially parallel with the magnetic force applied to the first structure.

18. The apparatus of claim 1, further comprising a third magnet, located adjacent the first magnet arid the second magnet, the third magnet positioned to increase the magnetic force generated by the first magnet and the second magnet.

19. The apparatus of claim 18, further comprising an annular magnet substantially surrounding the first, second and third magnets, the annular magnet configured to reduce the stiffness created by the first, second and third magnets.

20. An exposure apparatus that forms an image onto the substrate, comprising:

a substrate table that retains the substrate and includes a coarse stage and a fine stage; and

the apparatus according to claim 1;

wherein

the first structure of the apparatus includes the fine stage and the second structure of the apparatus includes the coarse stage; and

the magnet support of the apparatus supports the fine stage adjacent the coarse stage.

29. The apparatus of claim 1, wherein the adjustment mechanism is coupled to the first structure.

30. The apparatus of claim 1, wherein the adjustment mechanism is coupled to the second structure.

31. The apparatus of claim 1, wherein the adjustment mechanism is coupled to the first and second structures.

21. An apparatus that supports a first structure relative to a second structure, comprising:

a first assembly that includes a first magnetic member having a first magnetic polarization; and

a second assembly that includes a second magnetic member having a second magnetic polarization;

wherein

the direction of the first magnetic polarization of the first magnetic member is substantially parallel to a support direction of the first assembly;

a cross section of the first magnetic member cut by a plane perpendicular to the support direction has a circular outer periphery;

the second magnetic member surrounds at least an outer surface of a part of the first magnetic member with a gap;

the direction of the second magnetic polarization is different from the direction of the first magnetic polarization;

the first magnetic member and the second magnetic member present magnetic force therebetween; and

one of the first assembly and the second assembly is connected to the first structure and the other of the first assembly and the second assembly is connected to the second structure.

22. The apparatus of claim 21, wherein at least one of the first assembly and the second assembly includes an adjuster that varies the gap between the first magnetic member and the second magnetic member in the plane that is substantially parallel to the direction of the second magnetic polarization.

23. The apparatus of claim 21, wherein the second assembly includes an adjuster that changes position of the second magnetic member relative to the first magnetic member in the plane that is substantially parallel to the direction of the second magnetic polarization.

24. The apparatus of claim 21, wherein the second magnetic member includes a plurality of magnet segments, at least one of the magnet segments is movable relative to the other magnet segment.

25. The apparatus of claim 21, further comprising a bearing device disposed between the first assembly and the second assembly, the bearing device allowing relative motion between the first and second assemblies.

26. An exposure apparatus including the apparatus of claim 21.

27. A device manufactured with the exposure apparatus of claim 26.

28. A wafer on which an image has been formed by the exposure apparatus of claim 26.