OPTICAL GAIN APPROACH FOR ENHANCEMENT OF OVERLAY AND ALIGNMENT SYSTEMS PERFORMANCE

• US 20080266561A1
• Filed: 04/23/2008
• Published: 10/30/2008
• Est. Priority Date: 04/26/2007
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation
• Original Assignee: KLA-Tencor Corporation
• Inventors: Adel, Michael, Levinski, Vladimir, Kandel, Daniel, Seligson, Joel
• Granted Patent: US 7,602,491 B2
• Time in Patent Office: Days
• US Class Current: 356/399
• CPC Class Codes: G01B 11/272 using photoelectric detection means
• CPC Class Codes: G03F 7/70633 Overlay, i.e. relative alignment between patterns printed by separate exposures in different layers, or in the same layer in multiple exposures or stitching

Abstract

A resultant image of a grating target may be obtained by dividing an image of the target into first and second portions and optically modifying the first and/or second portion such that a final image formed from their combination is characterized by a Moiré pattern. The resultant image may be analyzed to determine a shift in the grating target from a shift in the Moiré pattern. Optical alignment apparatus may include a first beam splitter, an image transformation element optically coupled to the first beam splitter, and a second beam splitter. The first beam splitter divides an image of a grating target into first and second portions. The second beam splitter combines the first portion and the second portion. The image transformation element optically modifies the first and/or second portion such that a final image formed from their combination is characterized by a Moiré pattern.

Claims

1. An optical alignment apparatus, comprising:

a first beam splitter adapted to divide an image of a grating target on a substrate into first and second portions;

an image transformation element optically coupled to the first beam splitter; and

a second beam splitter adapted to combine the first portion from the first beam splitter and the second portion from the image transformation element,

wherein the image transformation element is configured to optically modify the first and/or second portion of the image of the grating target such that a final image formed from the combination of the first and second portions is characterized by a Moiré

pattern.

2. The apparatus of claim 1 wherein the image transformation element is configured to magnify the second portion, such that the second portion of the grating image is characterized by a grating pitch that is different from a grating pitch of the first portion of the image.

3. The apparatus of claim 2 wherein the image transformation element includes a penta prism optically coupled to a magnifying lens.

4. The apparatus of claim 1 wherein the image transformation element is configured to rotate the second portion of the image of the grating target relative to the first portion.

5. The apparatus of claim 4 wherein the image transformation element includes a Dove prism.

6. The apparatus of claim 1, further comprising an objective lens optically coupled to the first beam splitter and adapted to receive light from the grating target and transmit a collimated beam of light to the first beam splitter.

7. The apparatus of claim 1, further comprising a focusing lens optically coupled to the second beam splitter and adapted to form the final image from the combination of the first and second portions.

8. The apparatus of claim 7, further comprising an optical sensor configured to sense light from the final image.

9. The apparatus of claim 9, further comprising an image analyzer coupled to the optical sensor, the image analyzer having a memory containing one or more final images and a processor, the processor being adapted to compare a Moiré

pattern from an image signal obtained from the sensor with a Moiré

from an image stored in the memory or to compare two or more images stored in the memory to determine a shift in the position of the grating target between the images.

10. A method for optically aligning a substrate with a grating target, comprising:

a) obtaining a resultant image of the grating target by;

i) dividing an image of the grating target into first and second portions;

ii) optically modifying the first and/or second portion such that a final image formed from the combination of the first and second portions is characterized by a Moiré

pattern;

iii) combining the first and second portions to form the final image; and

b) analyzing the resultant image to determine a shift in the grating target from a shift in the Moiré

pattern.

11. The method of claim 10 wherein optically modifying the second portion includes rotating the second portion relative to the first portion such that the Moiré

pattern is produced when the first and second portions are combined to form the resultant image.

12. The method of claim 10 wherein ii) includes magnifying the second portion relative to the first portion such that the second portion of the image of the grating target is characterized by a different pitch than the first portion of the image of the grating target, whereby the Moiré

pattern is produced when the first and second portions are combined to form the resultant image.

13. The method of claim 10, further comprising compensating for the shift in the grating target determined from the shift in the Moiré

pattern.