Flash memory device and method of fabricating the same
First Claim
1. A method of fabricating a flash memory device, comprising:
- forming a first dielectric layer on an active region of a semiconductor substrate;
forming a first conductive layer on the first dielectric layer;
forming a mask pattern on the first conductive layer;
etching the first conductive layer using the mask pattern as an etch mask to form a first conductive pattern narrowing from its upper surface toward its middle portion;
forming a second dielectric layer on the semiconductor substrate having the first conductive pattern; and
on the semiconductor substrate having the second conductive layer, forming a second conductive pattern crossing the active region adjacent to the first conductive pattern and partially covering the first conductive pattern.
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Accused Products
Abstract
Provided are a flash memory device and a method of fabricating the same. The method includes forming a first dielectric layer on an active region of a semiconductor substrate. A first conductive layer is formed on the semiconductor substrate having the first dielectric layer. A mask pattern is formed on the first conductive layer. Using the mask pattern as an etch mask, the first conductive layer is etched to form a first conductive pattern narrowing from its upper surface toward its middle portion. A second dielectric layer is formed on the semiconductor substrate having the first conductive pattern. A second conductive pattern crossing the active region adjacent to the first conductive pattern and partially covering the first conductive pattern is formed on the semiconductor substrate having the second dielectric layer.
16 Citations
20 Claims
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1. A method of fabricating a flash memory device, comprising:
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forming a first dielectric layer on an active region of a semiconductor substrate; forming a first conductive layer on the first dielectric layer; forming a mask pattern on the first conductive layer; etching the first conductive layer using the mask pattern as an etch mask to form a first conductive pattern narrowing from its upper surface toward its middle portion; forming a second dielectric layer on the semiconductor substrate having the first conductive pattern; and on the semiconductor substrate having the second conductive layer, forming a second conductive pattern crossing the active region adjacent to the first conductive pattern and partially covering the first conductive pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A flash memory device, comprising:
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a first conductive pattern disposed on an active region of a semiconductor substrate, the first conductive pattern having a flat upper surface and narrowing from its upper surface toward its middle portion; a first dielectric layer interposed between the first conductive pattern and the active region; a second conductive pattern crossing the active region adjacent to the first conductive pattern and overlapping the first conductive pattern; and a second dielectric layer having a portion interposed between the second conductive pattern and the first conductive pattern and another portion interposed between the second conductive pattern and the active region. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification