COMBINE-INFORMATION PROCESSING APPARATUS, METHOD FOR PROCESSING COMBINE-INFORMATION, PROGRAM, AND RECORDING MEDIUM
First Claim
1. A combine-information processing apparatus comprising:
- an inspectional equation storage unit in which an inspectional equation for calculating one or more principal component scores can be stored, said inspectional equation being obtained by performing a principal component analysis on normal measured data that is measured data regarding a plurality of measuring objects in terms of two or more correlated measurement items, and said plurality of measuring objects being processed by a manufacturing apparatus whose adjustable conditions are changed while said manufacturing apparatus is in a normal state;
an inspected measured-data acceptance unit for accepting inspected measured data that is measured data regarding the measuring objects processed by said manufacturing apparatus in terms of the measurement items corresponding to each term contained in said inspectional equation;
a principal-component-score calculation unit for calculating the principal component scores using the inspected measured data, accepted by said inspected measured-data acceptance unit, with said inspectional equation;
an inspecting unit for inspecting the state of said manufacturing apparatus using the principal component scores calculated by said principal-component-score calculation unit; and
an output unit for outputting inspecting results obtained by said inspecting unit.
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Accused Products
Abstract
In order to solve the conventional problem in which the occurrence of abnormal behaviors in a manufacturing apparatus cannot be properly determine in view of the variations in measured data caused by adjustment made to the manufacturing apparatuses, the combine-information processing apparatus comprises: an inspectional equation storage unit 103 for storing an inspectional equation calculating one or more principal component scores, the inspectional equation being obtained by performing a principal component analysis on measured data on a plurality of measuring objects in terms of two or more correlated measurement items, and the measuring objects being processed by the manufacturing apparatus whose adjustable conditions are changed while the manufacturing apparatus is in a normal state; an inspected measured-data acceptance unit 104 for accepting inspected measured data on the measuring objects processed by the manufacturing apparatus in terms of the measurement items corresponding to each term contained in the inspectional equation; a principal-component-score calculation unit 105 for calculating principal component scores using the inspected measured data with the inspectional equation; an inspecting unit 106 for inspecting the manufacturing apparatus using the calculated principal component scores; and an output unit 107 for outputting the inspecting results.
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Citations
12 Claims
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1. A combine-information processing apparatus comprising:
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an inspectional equation storage unit in which an inspectional equation for calculating one or more principal component scores can be stored, said inspectional equation being obtained by performing a principal component analysis on normal measured data that is measured data regarding a plurality of measuring objects in terms of two or more correlated measurement items, and said plurality of measuring objects being processed by a manufacturing apparatus whose adjustable conditions are changed while said manufacturing apparatus is in a normal state; an inspected measured-data acceptance unit for accepting inspected measured data that is measured data regarding the measuring objects processed by said manufacturing apparatus in terms of the measurement items corresponding to each term contained in said inspectional equation; a principal-component-score calculation unit for calculating the principal component scores using the inspected measured data, accepted by said inspected measured-data acceptance unit, with said inspectional equation; an inspecting unit for inspecting the state of said manufacturing apparatus using the principal component scores calculated by said principal-component-score calculation unit; and an output unit for outputting inspecting results obtained by said inspecting unit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method for processing combine-information comprising:
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an inspected measured-data acceptance step of accepting inspected measured data that is measured data regarding a plurality of measuring objects processed by a manufacturing apparatus in terms of measurement items corresponding to terms contained in an inspectional equation stored in an inspectional equation storage unit, said inspectional equation calculating one or more principal component scores and obtained by performing a principal component analysis on normal measured data, said normal measured data being measured data regarding a plurality of measuring objects, that are processed by said manufacturing apparatus whose adjustable conditions are changed while said manufacturing apparatus is in a normal state, in terms of two or more correlated measurement items; a principal-component-score calculation step of calculating the principal component scores using the inspected measured data accepted in said inspected measured-data acceptance step with said inspectional equation; an inspecting step of inspecting the state of said manufacturing apparatus using the principal component scores calculated in said principal-component-score calculation step; and an output step of outputting inspecting results obtained in said inspecting step. - View Dependent Claims (10)
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11. A recording medium in which a program executable by a computer is recorded to perform:
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an inspected measured-data acceptance step of accepting inspected measured data that is measured data regarding a plurality of measuring objects processed by a manufacturing apparatus in terms of measurement items corresponding to terms contained in an inspectional equation stored in an inspectional equation storage unit, said inspectional equation calculating one or more principal component scores and obtained by performing a principal component analysis on normal measured data, said normal measured data being measured data regarding a plurality of measuring objects, that are processed by said manufacturing apparatus whose adjustable conditions are changed while said manufacturing apparatus is in a normal state, in terms of two or more correlated measurement items; a principal-component-score calculation step of calculating the principal component scores using the inspected measured data accepted in said inspected measured-data acceptance step with said inspectional equation; an inspecting step of inspecting the state of said manufacturing apparatus using the principal component scores calculated in said principal-component-score calculation step; and an output step of outputting inspecting results obtained in said inspecting step. - View Dependent Claims (12)
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Specification