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Semiconductor Acceleration Sensor

  • US 20080271535A1
  • Filed: 03/29/2006
  • Published: 11/06/2008
  • Est. Priority Date: 03/30/2005
  • Status: Active Grant
First Claim
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1. A semiconductor acceleration sensor, comprising:

  • a silicon wafer having a diaphragm formed within a wafer outer-circumferential frame section;

    a pedestal securing the wafer outer-circumferential frame section;

    a plumb bob disposed in the center of one surface of the diaphragm; and

    a plurality of beams extending, respectively, from the center of the surface of the diaphragm to the wafer outer-circumferential frame section along X axis and Y axis directions parallel to the surface of the diaphragm and orthogonal to each other,wherein the areas of cross section of the plurality of beams orthogonal to each axis at a predetermined position are set according to a maximum value of respective accelerations in the X axis and Y axis directions.

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