Scintillator panel and radiation image sensor
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Accused Products
Abstract
An Ag film as a light-reflecting film is formed on one surface of an a-C substrate of a scintillator panel. The entire surface of the Ag film is covered with an SiN film for protecting the Ag film. A scintillator having a columnar structure, which converts an incident radiation into visible light, is formed on the surface of the SiN film. The scintillator is covered with a polyparaxylylene film together with the substrate.
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Citations
89 Claims
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1-66. -66. (canceled)
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67. :
- A panel for detection of radiation, comprising;
a radiation transmitting conductive substrate; a metal film having a surface that reflects light; an intermediate film provided between the metal film and the conductive substrate to prevent the metal film from contacting the conductive substrate; a protective film formed of at least one inorganic film provided on the metal film; and a converter for converting a radiation image into a visible image. - View Dependent Claims (68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81)
- A panel for detection of radiation, comprising;
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82. :
- A panel for detection of radiation, comprising;
a radiation transmitting conductive substrate formed of aluminum; a metal film having a surface that reflects light; an intermediate film provided between the metal film and the conductive substrate to prevent the metal film from contacting the conductive substrate and to suppress corrosion of the metal film; and a protective film formed of at least one inorganic film provided on the metal film; and a converter for converting a radiation image into a visible image. - View Dependent Claims (83, 84, 85, 86, 87, 88, 89)
- A panel for detection of radiation, comprising;
Specification