"Interleaved Three-Dimensional On-Chip Differential Inductors and Transformers
First Claim
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1. An inductive 3D on-chip apparatus comprising a first coil and a second coil, the first and second coils each comprising successively connected windings centered on a common axis, wherein the windings of the first coil are interleaved with the windings of the second coil.
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Abstract
Interleaved three-dimensional (3D) on-chip differential inductors 110, 120 and transformer 100 are disclosed. The interleaved 3D on-chip differential inductors 110, 120 and transformer 100 make the best use of multiple metal layers in mainstream standard processes, such as CMOS, BiCMOS and SiGe technologies.
63 Citations
37 Claims
- 1. An inductive 3D on-chip apparatus comprising a first coil and a second coil, the first and second coils each comprising successively connected windings centered on a common axis, wherein the windings of the first coil are interleaved with the windings of the second coil.
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14. An interleaved three dimensional on-chip differential inductor, comprising;
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first and second coils formed on a plurality of layers on a chip and sharing a common alignment axis, each of the first and second coils comprising a plurality of partial windings wherein each partial winding is disposed on a layer with connections between successive partial windings of each of the first and second coils passing through the layers; and wherein the partial windings of the first and second coils are generally perpendicular to the common alignment axis and are interleaved. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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21. An interleaved three dimensional on-chip transformer, comprising;
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first and second coils formed on a plurality of layers on a chip and sharing a common alignment axis, each of the first and second coils comprising a plurality of partial windings wherein each partial winding is disposed on a layer with connections between successive partial windings of each of the first and second coils passing through the layers separating the successive partial windings of each of the first and second coils; wherein the partial windings of the first and second coils are generally perpendicular to the common alignment axis and are interleaved; third and fourth coils formed on the plurality of layers of the chip and sharing the common alignment axis, each of the third and fourth coils comprising a plurality of partial windings wherein each partial winding is disposed on a layer with connections between successive partial windings of each of the third and fourth coils passing through the layers separating the successive windings of each of the third and fourth coils; and wherein the partial windings of the third and fourth coils are generally perpendicular to the common alignment axis and are interleaved. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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36. A method for making three-dimensional on-chip differential inductors and transformers, comprising:
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forming a substrate in successive layers on a chip; disposing two partial windings on each layer, the partial windings having a common axis and forming the shape of a simple polygon or a simple closed curve; connecting each of the partial windings disposed on one of the layers to one of the partial windings of an adjacent layer; wherein the partial windings of one layer are disposed so as to be interleaved with the partial windings of adjacent layers. - View Dependent Claims (37)
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Specification